Fabrication and current-drive of SiGe∕Si ‘Micro-origami’ epitaxial MEMS device on SOI substrate

Tokuda, Takashi; Sakano, Youhei; Mori, Daisuke; Nunoshita, Masahiro; Vaccaro, Pablo O.; Vorob’ev, A. B.; Kubota, Kôhei; Saito, Nobuo

doi:10.1049/el:20046143

Cited by 11 publications

(9 citation statements)

References 6 publications

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“…The variety of shapes, high precision of formation of SiGe/Si shells, and compatibility of methods of their formation with the planar technology of fabricating silicon MEMS and IC offer prospects for the use of such shells in microelectromechanics and electronics. Activities aimed at formation, investigation, and application of three-dimensional micro-and nanostructures based on strained (SiGe/Si) and hybrid shells are currently underway in Russia, Germany, Switzerland, Taiwan, Japan, and USA [15][16][17][18][33][34][35][36][37][38][39][40]. Free-standing tubes protruding outside the substrate edge and bent and trough-shaped beams are used to create prototypes of cantilevers for atomic-force microscopes, as well as nanoprobes and micro-and nanoneedles for intracellular injections, and nanoinjectors for ink-jet printers [41][42][43].…”

Section: Discussionmentioning

confidence: 99%

“…It is planned to use tubes attached on the substrate as nanochannels for fluids in microlaboratories on a chip [42]. Thin-film beams and spirals are suitable for fabricating microelectromechanical mirrors-switches [37], flexible sensors of MEMS, and electrochemical nanosensors [36]. Possible areas of application of semiconductor and hybrid tubes, rings, spirals, and other shells in electronics include nanotransistors, capacitors, inductance coils, and optical resonators for lasers and light-emitting diodes [44][45][46].…”

Section: Discussionmentioning

confidence: 99%

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Elastic silicon-film-based nanoshells: Formation, properties, and applications

Prinz

Golod

2006

J Appl Mech Tech Phys

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Controllable formation and properties of solid single-crystal micro-and nanoshells of various shapes (tubes and spirals, vertically positioned rings and cylinders, and bent and trough-shaped cantilevers) are briefly reviewed, and new results are given. The shells and complicated structures of prescribed size and shape are formed with the use of elastic energy of initial strained SiGe/Si films of nanometer thickness and methods of highly selective and directed detachment of the films from the silicon substrates. It is experimentally demonstrated that the diameters of the fabricated SiGe/Si nanotubes are several times smaller than the values predicted by the continuum elasticity theory. The properties of the shells made of semiconductor and hybrid (metal-semiconductor and metal-dielectricsemiconductor) films and their applications in micro-and nanoscale electrical engineering are discussed.

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Section: Discussionmentioning

confidence: 99%

Section: Discussionmentioning

confidence: 99%

Elastic silicon-film-based nanoshells: Formation, properties, and applications

Prinz

Golod

2006

J Appl Mech Tech Phys

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“…We released a SiGe/Si heteroepitaxial layer and a micromirror device was fabricated. The fabrication process and characteristics of the Micro-Origami device is described [1].…”

Section: Introductionmentioning

confidence: 99%

SiGe/Si "Micro-Origami" Epitaxial MEMS Device on SOI Substrate

Tokuda

Nunoshita

2006

2006 International SiGe Technology and Device Meeting

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“…Recent research efforts demonstrate applications of this strained-bimorph construction technique to thin film bilayers at much smaller scales than ever before, using epitaxially grown semiconductor films (SilSiGe, InGaAs or GaAslInGaAs) to produce coiled cantilevers, nanocoils and tubes with internal radii varying from some nanometers to several microns [24], [57], [32], [58]. Free-standing strained heteroepitaxial layers automatically bend when the layers are released from the substrate (Figure lee)).…”

Section: Stress-mismatched Layersmentioning

confidence: 99%

“…It causes the plastic below the printed lines to contract and act like hinges that are activated by light [108]. All those mechanisms can cause the 58 photomechanical actuation, when exposure to light can triggers changes in the internal state of the structure (such as shape or volume), and lead to a mechanical response.…”

Section: Light Driven Microsystemsimicrodevicesmentioning

confidence: 99%

Incorporating nanomaterials with MEMS devices.

Moiseeva¹

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DEDICATION To my Mom and Dadiii ACKNOWLEDGEMENTS I would like to thank my professor, Dr. Cindy Harnett, for her guidance, endless support and patience. I am grateful to her for being a continuous source of motivation and inspiration. I would also like to thank my lab members: Yehya Senousy, Tom Lucas, Silpa Kona, and Jasmin Beharic who put their efforts in making the lab very exciting place to work. This dissertation demonstrates an elegant method, known as 'micro-origami' or strain architecture to design and fabricate three-dimensional MEMS structures which are assembled using actuation of a metal-oxide bilayer with conventional planar lithography.Folding allows creating complex, robust, three-dimensional shapes from two-dimensional material simply by choosing folds in the right order and orientation, small disturbances of the initial shape may also be used to produce different final shapes. These are referred to as "pop-up structures" in this work.The scope of this work presented the deposition of colloidal gold nanoparticles (GNPs) into conformal thin films using a microstenciling technique. Results illustrated that the gold nanoparticle deposition process can easily be integrated into current MEMS microfabrication processes. Thin films of GNPs deposited onto the surfaces of siliconbased bistable MEMS and test devices were shown to have a significant effect on the heating up of microstructures that cause them to fold.The dissertation consists of four chapters, covering details of fabrication methods, theoretical simulations, experimental work, and existing and potential applications.Chapter II illustrates how control of the folding order can generate complex threev dimensional objects from metal-oxide bilayers using this approach. By relying on the fact that narrower structures are released from the substrate first, it is possible to create multiaxis loops and interlinked objects with several sequential release steps, using a single photomask. The structures remain planar until released by dry silicon etching, making it possible to integrate them with other MEMS and microelectronic devices early in the process.Chapter III depicts the fabrication process of different types of bistable structures.It describes the principle of functioning of such structures, and simulations using CoventorWare are used to support the concept. We talk over about advantages and disadvantages of bistable structures, and discuss possible applications.Chapter IV describes fabrication procedure of nanoparticle-MEMS hybrid device.We introduce a convenient synthesis of GNPs with precisely controlled optical absorption in the NIR region by a single step reaction ofHAuCl 4 and Na2S203. We take a look at different techniques to pattern gold nanoparticles on the surface of MEMS structures, and also provide a study of their thermal properties under near IR stimulation.We demonstrate the first approach of laser-driven bistable MEMS actuators for bioapplications.

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Fabrication and current-drive of SiGe∕Si ‘Micro-origami’ epitaxial MEMS device on SOI substrate

Cited by 11 publications

References 6 publications

Elastic silicon-film-based nanoshells: Formation, properties, and applications

Elastic silicon-film-based nanoshells: Formation, properties, and applications

SiGe/Si "Micro-Origami" Epitaxial MEMS Device on SOI Substrate

Incorporating nanomaterials with MEMS devices.

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