Fabrication and Characterizations of Catalytic Methane Sensor Based on Microelectromechanical Systems Technology

Shen, Bin; Zhang, Hongquan; Liu, Xinlei; Cao, Shengwu; Yang, Peiqing

doi:10.1166/jno.2018.2435

Cited by 4 publications

(3 citation statements)

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“…The two-dimensional (2D) model is shown in Figure 1, including the annular wall and the sensor inlet and outlet. The physical object and 3D model of the sensor are shown in Figure 2 [21]. The main supporting component of the gas sensor is the microhotplate, as shown in Figure 2a.…”

Section: Physical Model and Working Mechanismmentioning

confidence: 99%

“…As shown in Figure 2b, the substrate is covered with micropores, which is the main reason for methane combustion. The inner walls of the pore are modified with catalysts, such as platinum and palladium, to form a The physical object and 3D model of the sensor are shown in Figure 2 [21]. The main supporting component of the gas sensor is the microhotplate, as shown in Figure 2a.…”

Section: Physical Model and Working Mechanismmentioning

confidence: 99%

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Numerical Simulation of Catalytic Methane Combustion in Al2O3 Directional Nanotubes Modified by Pt and Pd Catalyst

Shen

Zhou²,

Liu

et al. 2023

Applied Sciences

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“Blind holes” are the main reasons for the reduced performance of microgas sensor carriers. To improve the “blind hole” of catalytic combustion methane sensors and therefore, their thermal stability, this study presents a numerical simulation of the catalytic combustion in an Al2O3− oriented ceramic array involving porous microthermal plates. A three-visualization model of the sensor is established using the FLUENT software, and the simulation results are systematically analyzed based on the dynamics and thermodynamic mechanism of the microgas sensor. The results show that the regularity of the surface reaction presents a circular distribution, with the center line of the channel serving as the axis symmetry. The total reaction velocity in the array hole increases gradually from the inlet to the outlet. The flow velocity at the inlet should be controlled at more than 1 × 10−8 m/s, which is more accurate compared with the concept of “uniform velocity” in previous studies. The optimum pore size at the inlet should be 150 nm, and the inner pore size of the wall should be slightly higher than 300 nm, which is a more careful division compared with previous pore-size studies. The efficient reaction position is from the inlet to the quarter of the hole. The simulation results make up for the deficiencies in the analysis of the process parameters of the methane sensor carrier array hole and the internal reaction change process, as well as provide innovative comments on the sensor structure design. Through digital simulations, the limitations associated with the experiments can be avoided, the theoretical study can be improved, theoretical support can be provided for experiments related to the improvement of thermal stability, the predictability of experiments can be improved, and the feasibility of the research proposal can be verified. These steps are important for the improvement of the “blind hole” problem of catalytic combustion methane sensors.

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Section: Physical Model and Working Mechanismmentioning

confidence: 99%

Section: Physical Model and Working Mechanismmentioning

confidence: 99%

Numerical Simulation of Catalytic Methane Combustion in Al2O3 Directional Nanotubes Modified by Pt and Pd Catalyst

Shen

Zhou²,

Liu

et al. 2023

Applied Sciences

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“…Tang et al (2020) used single-walled carbon nanotubes (SWNT) to fabricate NH 3 sensors, obtaining a superior sensitivity of 2.44% R/R per ppm v NH 3 , which is more than 60 times higher than intrinsic SWNT-based sensors. Bin Shen (Shen et al, 2018) and others studied the pore forming technology of MWCNTs supported on aligned nanotubes and designed and fabricated a kind of hot-wire-coated ceramic powder thermal conductivity sensor for methane detection with a response recovery time of 8 s and 16 s (Xibo et al, 2013).…”

Section: Introductionmentioning

confidence: 99%

Improved Sensing Properties of Thermal Conductivity-Type CO2 Gas Sensors by Loading Multi-Walled Carbon Nanotubes Into Nano-Al2O3 Powders

et al. 2021

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Response time is the key index of on-line monitoring system. To improve the response speed of traditional bead thermal conductivity CO2 sensor, this paper proposes to use multi-walled carbon nanotubes (MWCNTs) to improve the performance of gas sensor carrier. Nano-sized γ-Al2O3/CeO2 powder was synthesized by chemical precipitation method under the action of ultrasonic wave. SEM morphology reveals a particle size of 20–50 nm. MWCNTs were hydroxylated and the solution was then prepared by adding a certain amount of dispersant under ultrasonic wave. The composite support of γ- Al2O3/CeO2/MWCNTs was prepared by wet mixing carbon nanotube solution into the above support materials. Using dynamic resistance matching and black component technology, the influence of radiation heat and environmental temperature and humidity is reduced. Results show that the designed thermal conductivity sensor has consistent response and recovery time to different concentrations of CO2, with a T90 response time of 9 s and a T90 recovery time of 13 s, which is faster compared to major commercial Carbon dioxide sensors. The average sensitivity of the sensor is 0.0075 V/10% CO2. Therefore, the high thermal conductivity and pore characteristics of carbon nanotubes can effectively improve the response speed of the thermal conductivity sensor.

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A novel catalytic-type gas sensor based on alumina ceramic substrates loaded with catalysts and printed electrodes

Liu

et al. 2021

Chinese Journal of Analytical Chemistry

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Fabrication and Characterizations of Catalytic Methane Sensor Based on Microelectromechanical Systems Technology

Cited by 4 publications

References 0 publications

Numerical Simulation of Catalytic Methane Combustion in Al2O3 Directional Nanotubes Modified by Pt and Pd Catalyst

Numerical Simulation of Catalytic Methane Combustion in Al2O3 Directional Nanotubes Modified by Pt and Pd Catalyst

Improved Sensing Properties of Thermal Conductivity-Type CO2 Gas Sensors by Loading Multi-Walled Carbon Nanotubes Into Nano-Al2O3 Powders

A novel catalytic-type gas sensor based on alumina ceramic substrates loaded with catalysts and printed electrodes

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