Fabrication and characterization of torsion-mirror actuators for optical networking applications

Wu, Wengang; Li, D.C.; Sun, Wei; Hao, Yue; Yan, Guizhen; Jin, Shijiu

doi:10.1016/s0924-4247(03)00366-2

Cited by 11 publications

(3 citation statements)

References 6 publications

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“…From the variety of prototypes provided by well developed microoptoelectromechanical system (MOEMS) devices, such as torsional optical switches [14,15] and optical scanning mirrors [16][17][18], an electrostatically driven torsional plate was chosen as the carrier actuator to be combined with permanent magnetic components. The schematic view and lateral dimension parameters of the proposed microactuator are shown in Fig.…”

Section: Working Principle and Device Designmentioning

confidence: 99%

“…Compared with the earlier reported microactuators [14][15][16][17][18], we employed KOH wet etching rather than expensive DRIE technology in the bulk micromachining process, which cut down the fabrication cost to a significant degree. KOH etching is a batch process, many wafers can be fabricated at one time.…”

Section: Fabrication Characterisation and Experimental Setupmentioning

confidence: 99%

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Electrostatically driven magnetic field micromodulator with continuous modulating angle and large shifting range

Liu

Cao

et al. 2013

Micro & Nano Letters

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Presented is a novel magnetic field modulator made up of permanent magnets, and having a torsional electrostatically driven structure, which was fabricated by electrodeposition and released by KOH solution wet etching. The magnetic properties of the electrodeposited CoNiMnP micromagnets and the torsional angle with respect to the driving voltage of the microdevice have been measured, and the modulation of the magnetic field has been demonstrated. The low power consumption micromodulator, which can achieve a continuous torsional angle of 0°-18°and a pull-in angle of 54.7°, has its own advantage over the traditional magnetic field modulating devices. The novel modulator has not only provided a more effective approach for magnetic field modulation, but also offered a torsional carrier actuator to be integrated with various functional materials or components in many applications.

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Section: Working Principle and Device Designmentioning

confidence: 99%

Section: Fabrication Characterisation and Experimental Setupmentioning

confidence: 99%

Electrostatically driven magnetic field micromodulator with continuous modulating angle and large shifting range

Liu

Cao

et al. 2013

Micro & Nano Letters

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show abstract

“…The pull-in effect, however, limit the continuous operating (such as scanning) range of the mirrors finally. Furthermore, before the pull-in phenomenon takes place, the electrostatic plate-electrode couple drives are only able to make the micro-mirrors have a relatively large continuous rotating angle at high voltages 6,8 . Compared with the previous one, the electrostatic vertical comb drives composed conceptually of interdigitated uneven fixed and movable comb fingers exhibit several inherent advantages for actuating the micro-mirrors.…”

Section: Introductionmentioning

confidence: 99%

Torsion-mirror optical actuators with compound driving structures

Chen

Yan

et al. 2004

SPIE Proceedings

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A new kind of torsion-mirror optical actuators with compound driving structures is reported. The advanced compound driving structures are made up of plate-electrode couple drives and vertical comb drives, and are proved experimentally to be able to actuate mirrors to achieve not only large-range continuous rotation but also 90 o rotation. A set of surfaceand-bulk-mixed-silicon-micromachining process has been developed to manufacture the new torsion-mirror optical actuators in SOI wafers. In the processing, the comb fingers of about 180 m in depth are produced. A synthetic coupling-loss model for the coupling system composed of the mirrors and the input and output fiber ends is obtained when the torsion-mirror actuators are brought into use as optical switches or attenuators, etc. for fiber communication applications.

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Techniques in the Design of Micro-Machined Electrostatic Torsion Micro-Mirrors and Their Applications

Hao

Mems/Nems

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Fabrication and characterization of torsion-mirror actuators for optical networking applications

Cited by 11 publications

References 6 publications

Electrostatically driven magnetic field micromodulator with continuous modulating angle and large shifting range

Electrostatically driven magnetic field micromodulator with continuous modulating angle and large shifting range

Torsion-mirror optical actuators with compound driving structures

Techniques in the Design of Micro-Machined Electrostatic Torsion Micro-Mirrors and Their Applications

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