Fabrication and Characterization of Three-Dimensional Silver-Coated Polymeric Microstructures

Chen, Yun Sheng; Tal, Amir; Torrance, David; Kuebler, Stephen M.

doi:10.1002/adfm.200600394

Cited by 71 publications

(48 citation statements)

References 36 publications

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“…[122] These amines can be used to form gold seeds by reduction, and the gold can then catalyze electroless silver reduction. As granular structures are formed by the electroless deposition, the silver coating has a conductivity that is about 1.5 % of that of bulk silver.…”

Section: Chemical Deposition Of Metals On 3d Microstructuresmentioning

confidence: 99%

Multiphoton Fabrication

et al. 2007

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Chemical and physical processes driven by multiphoton absorption make possible the fabrication of complex, 3D structures with feature sizes as small as 100 nm. Since its inception less than a decade ago, the field of multiphoton fabrication has progressed rapidly, and multiphoton techniques are now being used to create functional microdevices. In this Review we discuss the techniques and materials used for multiphoton fabrication, the applications that have been demonstrated, as well as those being pursued. We also consider the outlook for this field, both in the laboratory and in industrial settings.

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Section: Chemical Deposition Of Metals On 3d Microstructuresmentioning

confidence: 99%

Multiphoton Fabrication

et al. 2007

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“…[16][17][18][19][20] With this technique too, the maximum intensity cannot greatly exceed the solubility threshold if fi ne features with near-diffractionlimited resolution are required so, following development, some shrinkage in the more highly exposed regions is again unavoidable. To alleviate this problem it is necessary to provide strong, over-exposed, surrounding walls.…”

Section: Introductionmentioning

confidence: 99%

The Control of Shrinkage and Thermal Instability in SU‐8 Photoresists for Holographic Lithography

Denning

Blanford

Urban

et al. 2011

Adv Funct Materials

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The negative‐tone epoxy photoresist, SU‐8, expands ≈1% by volume after postexposure baking. However, if the maximum optical fluence is comparable to that at the insolubility threshold, as in a holographic exposure, the developed resist shrinks (≈35% by volume) due to the removal of light oligomers not incorporated into the polymeric network. IR spectroscopy shows that, at this level of exposure, only 15% of the epoxy groups in the insoluble polymer have reacted; consequently microstructural elements soften and collapse at >100 °C. When the light oligomers are removed, the sensitivity of the resist is unchanged, provided that 5% (w/w) of a high‐molecular‐weight reactive plasticizer (glycidoxy‐terminated polyethylene glycol) is added, but it shrinks less on development and, when used as a photonic crystal template, shows improved uniformity with less cracking and buckling. Reinforcing the polymer network by reaction with the polyfunctional amine (bis‐N,N′‐(3‐aminopropyl)ethylenediamine) increases the extent of cross‐linking and the thermal stability, allowing inverse replicas of photonic crystal templates to be fabricated from both Al:ZnO and Zr3N4 using atomic layer deposition at temperatures up to 200 °C.

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“…One approach is to use a standard photolithographic material, such as the negative photoresist SU8 for the fabrication of the structures, and subsequently activate their surface. [34,35] In this case additional processing, to enable the metal adhesion on the surface, is required and the quality, structural integrity and resolution of the structures depends on the building material …”

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confidence: 99%

Three‐Dimensional Metallic Photonic Crystals with Optical Bandgaps

et al. 2012

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The fabrication of fully three-dimensional photonic crystals with a bandgap at optical wavelengths is demonstrated by way of direct femtosecond laser writing of an organic-inorganic hybrid material with metal-binding moieties, and selective silver coating using electroless plating. The crystals have 600-nm intralayer periodicity and sub-100 nm features, and they exhibit well-defined diffraction patterns.

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Fabrication and Characterization of Three-Dimensional Silver-Coated Polymeric Microstructures

Cited by 71 publications

References 36 publications

Multiphoton Fabrication

Multiphoton Fabrication

The Control of Shrinkage and Thermal Instability in SU‐8 Photoresists for Holographic Lithography

Three‐Dimensional Metallic Photonic Crystals with Optical Bandgaps

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