Fabrication and characterization of sub-100/10 nm planar nanofluidic channels by triple thermal oxidation and silicon-glass anodic bonding

Ouyang, Wei; Wang, Wei

doi:10.1063/1.4894160

Cited by 10 publications

(7 citation statements)

References 26 publications

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“…may have influence on the estimation of flow resistance. 42,44 For example, the further increased flow resistance may be induced by surface roughness; however, this effect strongly depends on the fabrication technology. Besides, the formation and entrapment of nanobubbles at the advancing liquid meniscus will also cause an immediate decrease in the filling speed.…”

Section: ■ Results and Discussionmentioning

confidence: 99%

Anomalous Capillary Rise under Nanoconfinement: A View of Molecular Kinetic Theory

Feng

Wang

et al. 2018

Langmuir

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Understanding the capillary filling behaviors in nanopores is crucial for many science and engineering problems. Compared with the classical Bell-Cameron-Lucas-Washburn (BCLW) theory, anomalous coefficient is always observed because of the increasing role of surfaces. Here, a molecular kinetics approach is adopted to explain the mechanism of anomalous behaviors at the molecular level; a unified model taking account of the confined liquid properties (viscosity and density) and slip boundary condition is proposed to demonstrate the macroscopic consequences, and the model results are successfully validated against the published literature. The results show that (1) the effective viscosity induced by the interaction from the pore wall, as a function of wettability and the pore dimension (nanoslit height or nanotube diameter), may remarkably slow down the capillary filling process more than theoretically predicted. (2) The true slip, where water molecules directly slide on the walls, strongly depends on the wettability and will increase as the contact angle increases. In the hydrophilic nanopores, though, the magnitude may be comparable with the pore dimensions and promote the capillary filling compared with the classical BCLW model. (3) Compared with the other model, the proposed model can successfully predict the capillary filling for both faster or slower capillary filling process; meanwhile, it can capture the underlying physics behind these behaviors at the molecular level based on the effective viscosity and slippage. (4) The surface effects have different influence on the capillary filling in nanoslits and nanotubes, and the relative magnitude will change with the variation of wettability as well as the pore dimension.

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Section: ■ Results and Discussionmentioning

confidence: 99%

Anomalous Capillary Rise under Nanoconfinement: A View of Molecular Kinetic Theory

Feng

Wang

et al. 2018

Langmuir

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“…Expensive capital cost and a reactor is needed [145] Line of sight' limitation Requires a cooling water system Thermal oxidation 100 A high temperature is required [146] Limited set of high-temperature materials CVD 10 Corrosive chemical usage along with the controlled process, special pumping, and disposal equipment [147] Gasses are toxic, corrosive, flammable, and explosive…”

Section: Properties Modification Pvd 10mentioning

confidence: 99%

Microadditive Manufacturing Technologies of 3D Microelectromechanical Systems

2021

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Conventional microfabrication processes have been well established, but their capabilities are generally limited simple and 2D extruded geometries. Additive manufacturing allows the ability to manufacture true 3D complex geometries, rapid design for manufacturing, mass customization, materials savings, and high precision, which have triggered the increased interest in manufacturing microelectromechanical systems (MEMS). Herein, MEMS manufacturing's recent advancements, including both conventional and additive manufacturing technologies, their working principles, and practical capabilities are consolidated. The use of additive manufacturing in several MEMS areas such as in microelectronics, circuitry, microfluidics, lab on a chip, packaging, and structural MEMS is also discussed in detail. Furthermore, the potentials and limitations of additive manufacturing are investigated with regard to the MEMS requirements. Finally, the technology outlook and improvements are discussed. This study shows that additive manufacturing offers a promising future for the fabrication of MEMS, especially using high‐resolution techniques such as microstereolithography, materials jetting, and materials extrusion. In contrast, current challenges such as materials requirements, equipment innovation, fabricating of in vivo devices for biomedical applications, inherited defects and poor surface finish, adhesion to substrates, and productivity are areas that require further study to increase the uptake by the MEMS community.

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“…[35][36][37] Besides, flow-through nano-hole array also can function as nanofluidic channels in many exciting applications such as DNA and RNA translocation and profiling. [38][39][40][41] Despite its clear superiority, the free-standing flow-through nano-hole array thin film, normally operating in a fluidic field, is certainly subject to mechanical deformation, which alone presumably induces EOT spectral change as EOT is highly sensitive to the structure of nano-holes. This fluidic field induced spectral change, though not caused by the change of analytes (i.e., dielectric function), has long been blindly recorded in the measurement signal.…”

Section: Introductionmentioning

confidence: 99%

Study of flow rate induced measurement error in flow-through nano-hole plasmonic sensor

Huang

Wang

et al. 2015

Biomicrofluidics

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Flow-through gold film perforated with periodically arrayed sub-wavelength nano-holes can cause extraordinary optical transmission (EOT), which has recently emerged as a label-free surface plasmon resonance sensor in biochemical detection by measuring the transmission spectral shift. This paper describes a systematic study of the effect of microfluidic field on the spectrum of EOT associated with the porous gold film. To detect biochemical molecules, the sub-micron-thick film is free-standing in a microfluidic field and thus subject to hydrodynamic deformation. The film deformation alone may cause spectral shift as measurement error, which is coupled with the spectral shift as real signal associated with the molecules. However, this microfluid-induced measurement error has long been overlooked in the field and needs to be identified in order to improve the measurement accuracy. Therefore, we have conducted simulation and analytic analysis to investigate how the microfluidic flow rate affects the EOT spectrum and verified the effect through experiment with a sandwiched device combining Au/Cr/Si3N4 nano-hole film and polydimethylsiloxane microchannels. We found significant spectral blue shift associated with even small flow rates, for example, 12.60 nm for 4.2 μl/min. This measurement error corresponds to 90 times the optical resolution of the current state-of-the-art commercially available spectrometer or 8400 times the limit of detection. This really severe measurement error suggests that we should pay attention to the microfluidic parameter setting for EOT-based flow-through nano-hole sensors and adopt right scheme to improve the measurement accuracy.

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Fabrication and characterization of sub-100/10 nm planar nanofluidic channels by triple thermal oxidation and silicon-glass anodic bonding

Cited by 10 publications

References 26 publications

Anomalous Capillary Rise under Nanoconfinement: A View of Molecular Kinetic Theory

Anomalous Capillary Rise under Nanoconfinement: A View of Molecular Kinetic Theory

Microadditive Manufacturing Technologies of 3D Microelectromechanical Systems

Study of flow rate induced measurement error in flow-through nano-hole plasmonic sensor

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