Fabrication and characterization of monocrystalline-based composite Pb(Zr, Ti)O3 thin film patterned with a polycrystalline crack stopper structure
Shinya Yoshida,
Yu Katsumata,
Shuji Tanaka
Abstract:This paper presents a novel form of Pb(Zr,Ti)O3 (PZT) thin film with a structure in which monocrystalline (Mono) PZT is sectioned with narrow mesh-like polycrystalline (Poly) PZT. The motivation is to overcome the inherent brittleness of piezoelectric Mono thin films. The design assumes that the Poly pattern will stop crack propagation within the Mono area. As a proof of concept, a Mono-Poly PZT composite thin film with a 20-µm-pitch and 2-µm-wide Poly pattern was sputter-deposited on a patterned underlayer on… Show more
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