Fabrication and characterization of IC-Compatible Linear Variable Optical Filters with application in a micro-spectrometer

Emadi, A.; Wu, H.; Grabarnik, S.; Graaf, G. de; Hedsten, Karin; Enoksson, Peter; Correia, J. H.; Wolffenbuttel, R.F.

doi:10.1016/j.sna.2010.04.029

Cited by 38 publications

(23 citation statements)

References 11 publications

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“…The process starts by deposition of the lower dielectric mirror stack and the oxide layer that results in the cavity layer (layers 1-8 in Table 1). Photoresist is spin coated as the next step and lithography is applied to define the strip-like structure in the resist layer to be reflowed [8,10]. A series of trenches of constant width and with variable spatial frequency or trenches of variable width and constant pitch are etched over the length of the strip of resist to vary the effective amount of resist per unit area.…”

Section: Lvof Fabricationmentioning

confidence: 99%

“…Light passes an aperture and collimating optics before being projected onto the LVOF, which is placed or deposited on the top of the detector. Equations (8) and (9) can be used to design the focal length of the collimating lens and the aperture size [8].…”

Section: Spectral Measurement For Narrowband Applicationmentioning

confidence: 99%

“…This paper covers different aspects for realization of such microspectrometers. Parts of this work, such as the initial idea [6,7] and the fabrication technique [8], have been published before. This paper covers all the design issues in detail, whereas the fabrication is summarized.…”

Section: Introductionmentioning

confidence: 99%

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Design and implementation of a sub-nm resolution microspectrometer based on a Linear-Variable Optical Filter

Emadi¹,

Wu²,

Graaf³

et al. 2011

Opt. Express

127

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Abstract:In this paper the concept of a microspectrometer based on a Linear Variable Optical Filter (LVOF) for operation in the visible spectrum is presented and used in two different designs: the first is for the narrow spectral band between 610 nm and 680 nm, whereas the other is for the wider spectral band between 570 nm and 740 nm. Design considerations, fabrication and measurement results of the LVOF are presented. An iterative signal processing algorithm based on an initial calibration has been implemented to enhance the spectral resolution. Experimental validation is based on the spectrum of a Neon lamp. The results of measurements have been used to analyze the operating limits of the concept and to explain the sources of error in the algorithm. It is shown that the main benefits of a LVOF-based microspectrometer are in case of implementation in a narrowband application. The realized LVOF microspectrometers show a spectral resolution of 2.2 nm in the wideband design and 0.7 nm in the narrowband design. 51-54 (1994). 13. K. Burns, K. B. Adams, and J. Longwell, "Interference measurements in the spectra of neon and natural mercury," J. Opt. Soc. Am. 40(6), 339-344 (1950 ©2011 Optical Society of America

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Section: Lvof Fabricationmentioning

confidence: 99%

Section: Spectral Measurement For Narrowband Applicationmentioning

confidence: 99%

See 1 more Smart Citation

Design and implementation of a sub-nm resolution microspectrometer based on a Linear-Variable Optical Filter

Emadi¹,

Wu²,

Graaf³

et al. 2011

Opt. Express

127

View full text Add to dashboard Cite

show abstract

“…Recently optical technologies have developed to be able to implement optical filters for low pass filters, high pass filters, band pass filters, and band rejection filters [1]- [4]. For an optical sensor system which makes use of optical wavelength variation as an indication in the change of some physical quantity such as temperature, pressure, strain, chemical component variation, and so on [1]- [5]. For those purposes, Fiber Bragg Grating (FBG) filter as an optical sensor have mostly been used [6]- [8].…”

Section: Introductionmentioning

confidence: 99%

A Wavelength Identification System Using an Optical Source Spectrum

2017

IJCCIE

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Abstract-: This paper proposes an optical wavelength identification system without any wavelength analyzing instrument which is vulnerable to environment vibration and impact. The proposed system obtains wavelength information through the conversion from measured intensity on a photodetector to an optical wavelength using spectrum characteristics of an optical source in the system. Data processing unit of the proposed system has data of intensity vs, wavelength of the optical source. The proposed system is advantageous in terms of overall cost, system volume, and robustness to mechanical impact.

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“…Smith-Helmholtz invariant theorem results d NA=D ϕ, that can be rewritten as d =D ϕ/NA in which d is the diameter of the aperture and ϕ is maximum acceptable angle of incidence on the LVOF. ϕ depends on the desired spectral precision [3]. Table 1 shows the designed thickness of the layers used for the multilayered LVOF.…”

Section: Introductionmentioning

confidence: 99%

An UV linear variable optical filter-based micro-spectrometer

Emadi

Graaf

et al. 2010

Procedia Engineering

Self Cite

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This paper presents the design, fabrication and spectral measurements of an Ultra-Violet (UV) Linear Variable Optical Filter (LVOF)-based micro-spectrometer operating in the 300 nm -400 nm wavelength range. The UV LVOF has been fabricated in an IC-Compatible process using resist reflow. Characterization by passing monochromatic light through the LVOF, shows high linearity of the profile. It is expected that using signal processing, spectral resolution better than 0.5 nm can be achieved with this UV LVOF. The filter provides the possibility to have a robust high-resolution micro-spectrometer in the UV on a CMOS chip.

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Fabrication and characterization of IC-Compatible Linear Variable Optical Filters with application in a micro-spectrometer

Cited by 38 publications

References 11 publications

Design and implementation of a sub-nm resolution microspectrometer based on a Linear-Variable Optical Filter

Design and implementation of a sub-nm resolution microspectrometer based on a Linear-Variable Optical Filter

A Wavelength Identification System Using an Optical Source Spectrum

An UV linear variable optical filter-based micro-spectrometer

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