Fabrication and characterization of gated field emitter arrays with self-aligned carbon nanotubes grown by chemical vapor deposition

Abstract

Field emitter arrays with multiwall carbon nanotubes (CNTs) grown inside their gated holes were fabricated on glass substrates. The Fe–Ni–Co alloy catalyst dots on which the CNTs would be grown were deposited into the gated holes by a self-aligned method to maintain a constant distance between CNT emitters and gate electrodes. The CNTs were synthesized by thermal chemical vapor deposition using a gas mixture of CO and H2 at 500 °C. The CNT lengths were controlled by changing ratios of CO to H2. Field emission currents and images were monitored as a function of gate and anode voltages. It was shown that the CNT emitters grown just up to the gate electrode height operated best in a triode mode.

Controlled Termination of the Growth of Vertically Aligned Carbon Nanotube Arrays

“…Vertically aligned carbon nanotube (CNT) arrays are widely known for their self-organized structures with uniform orientation, [1][2][3][4] and their application as field emitters in flat panel displays (FPDs) [2,5] and other vacuum electronics. [6] Because of their relatively high work function, [7] carbon nanotubes experience a large tensile stress during field emission, [8] and are frequently torn away by the electric field, usually resulting in device failure due to a short circuit or discharge.…”

Single-walled carbon nanotube network/poly composite thin film for flow sensor

“…Scientists throughout the world make their efforts to using it in electrical interconnects (Lee et al , 2003Kim et al 2009a, b), field-effect transistors (Lee et al 2003;Ahlskog et al 2000;Cid et al 2009), field emitters (Han et al 2002), and sensors (Snow et al 2005;Hou et al 2006;Kim et al 2009a, b;Yang et al 2009;Tooski 2010). CNTs can be exhibited good conductor and semiconductor behaviors based on their unique structures (Dresselhaus 1998).…”

Elongation of vertically well-aligned carbon nanofiber bundles and their field emission characteristics

“…For example, they are useful for the application as an electron emitter in the specific area requiring the vertically high stability, such as the concaved surfaces and triode type holes [1][2][3]. Generally, the bundles formation of the carbon nanofilaments has been known to be limited within the formation of single-walled carbon nanotubes [4][5][6][7][8][9].…”