Fabrication and characterization of a pressure sensor using a pitch-based carbon fiber

Park, C. S.; Kang, Beom-Soo; Lee, D. W.; Choi, Tae-Youl; Choi, Yong-Sung

doi:10.1016/j.mee.2007.01.068

Cited by 21 publications

(10 citation statements)

References 4 publications

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“…As compared to other pressure sensors composed of micro-materials, the CMC pressure sensor in this work has the greatest sensitivity (Table 1). The sensitivity in this work is almost 10.3 times that reported in [4] (metallic single-walled carbon nanotube), 25.6 times that in [5] (multi-walled carbon nanotubes), and 15.1 times that in [6] (carbon fiber). The 3D structure of CMCs allowed a large amount of contact area, resulting in the greatest variation in contact resistance.…”

Section: Resultssupporting

confidence: 51%

“…Pressure sensors need high sensitivity and strong discriminatory abilities for wide applications. Various techniques using the Micro Electro Mechanical System (MEMS) processes and nanomaterials have been reported, such as the carbon nanotube pressure sensor [4,5] and carbon fiber pressure sensor [6]. However, these techniques require complex manufacturing processes and exhibit low piezoresistance sensitivity, less than 0.09%/kPa.…”

Section: Introductionmentioning

confidence: 99%

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Fabrication of High Sensitivity Carbon Microcoil Pressure Sensors

Chang

et al. 2012

Sensors

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This work demonstrates a highly sensitive pressure sensor that was fabricated using carbon microcoils (CMCs) and polydimethylsiloxane (PDMS). CMCs were grown by chemical vapor deposition using various ratios of Fe-Sn catalytic solution. The pressure sensor has a sandwiched structure, in which the as-grown CMCs were inserted between two PDMS layers. The pressure sensor exhibits piezo-resistivity changes in response to mechanical loading using a load cell system. The yields of the growth of CMCs at a catalyst proportion of Fe:Sn = 95:5 reach 95%. Experimental results show that the sensor achieves a high sensitivity of 0.93%/kPa from the CMC yield of 95%. The sensitivity of the pressure sensor increases with increasing yield of CMCs. The demonstrated pressure sensor shows the advantage of high sensitivity and is suitable for mass production.

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Section: Resultssupporting

confidence: 51%

Section: Introductionmentioning

confidence: 99%

Fabrication of High Sensitivity Carbon Microcoil Pressure Sensors

Chang

et al. 2012

Sensors

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“…The most common pressure sensors used in microfluidics are capacitive [17] and piezoresistive [18,19,20]. Besides these, other variations, such as optical [21,22,23], vision-based [24] and resonant sensors, do exist.…”

Section: Introductionmentioning

confidence: 99%

“…Park et al [20] developed a carbon fibre-based piezoresistive pressure sensor. While traditional piezoresistive sensors have four diffused silicon wire sensing piezoresistors in a closed Wheatstone bridge configuration, in the one here developed these piezoresistors are replaced with carbon fibres.…”

Section: Introductionmentioning

confidence: 99%

Towards an Optimal Pressure Tap Design for Fluid-Flow Characterisation at Microscales

2019

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Measuring fluid pressure in microchannels is difficult and constitutes a challenge to even the most experienced of experimentalists. Currently, to the best of the authors’ knowledge, no optimal solution are being used for the design of pressure taps, nor guidelines concerning their shape and its relation with the accuracy of the readings. In an attempt to address this issue, a parametric study was devised to evaluate the performance of different pressure tap designs, 18 in total. These were obtained by combining three shape parameters: sub-channel width (w) and sub-channel–tap radius (R) or angle (α), while having the sub-channel length kept constant. For each configuration, pressure drop measurements were carried out along several lengths of a straight microfluidic rectangular channel and later compared to an analytical solution. The microchannels were fabricated out of PDMS using standard soft-lithography techniques, pressure drop was measured with differential pressure sensors, the test fluid was DI water and the flow conditions varied from creeping flow up to R e c ∼100. Pressure taps, having smooth contours (characterised by the radius R) and a sub-channel width (w) of 108 μ m , performed the best with results from that of radius R = 50 μ m only falling short of the theory by a mere ∼ 5 % .

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“…Using a Wheatstone bridge helps in cancelling out the temperature effects due to TCR (Kumar and Pant 2014b). Different materials have been reported to exhibit the property of piezoresistance, such as silicon (Zhang et al 2007;Bian et al 2009), polysilicon (Tsai et al 2009;Malhaire and Barbier 2003), silicon carbide (Fraga et al 2010;Wu et al 2006), carbon fibre (Park et al 2007), diamond (Werner et al 1998;Wur et al 1995) etc. Generally, silicon or polysilicon based piezoresistors are used in pressure sensor because of well-established fabrication processes for realizing the sensors.…”

Section: Introductionmentioning

confidence: 99%