2010
DOI: 10.1063/1.3273410
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Fabrication and characterization of a porous silicon based microarray for label-free optical monitoring of biomolecular interactions

Abstract: We have fabricated a microarray of porous silicon Bragg reflectors on a crystalline silicon substrate using a technological process based on standard photolithography and electrochemical anodization of the silicon. The array density is of 170 elements/cm2 and each element has a diameter of 200 μm. The porous silicon structures have been used as platform to immobilize an amino terminated DNA single strand probe. All fabrication steps have been monitored by spectroscopic reflectometry, optical and electron micro… Show more

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Cited by 50 publications
(38 citation statements)
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“…An intense visible photoluminescence of PS, its anti-reflective properties and band gap increased due to the quantum confined effect in silicon nanocrystals give a perspective of PS use in optoelectronics and photonics [15,16]. High chemical and adsorption sensitivity of large internal surface PS is actively exploited in the touch-sensing electronics and biomedical technologies [17][18][19][20].…”
Section: Introductionmentioning
confidence: 99%
“…An intense visible photoluminescence of PS, its anti-reflective properties and band gap increased due to the quantum confined effect in silicon nanocrystals give a perspective of PS use in optoelectronics and photonics [15,16]. High chemical and adsorption sensitivity of large internal surface PS is actively exploited in the touch-sensing electronics and biomedical technologies [17][18][19][20].…”
Section: Introductionmentioning
confidence: 99%
“…An intense visible photoluminescence of PS, its anti-reflective properties and band gap increased due to the quantum confined effect in silicon nanocrystals give a perspective of PS use in optoelectronics and photonics [ 15 , 16 ]. High chemical and adsorption sensitivity of large internal surface PS is actively exploited in the touch-sensing electronics and biomedical technologies [ 17 20 ].…”
Section: Introductionmentioning
confidence: 99%
“…Recently, we have proposed a microarray of porous silicon (Psi) one-dimensional photonic crystals as a functional platform for label-free detection of biomolecular interactions. 8 PSi is by far an attractive support for the immobilization of biological probes due to its sponge-like morphology, constituted by a network of air holes in the silicon matrix, and characterized by a specific surface area of the order of hundreds of square meters per cubic centimetres. 9 PSi can be fabricated by electrochemical etching of doped crystalline silicon in hydrofluoridric acid: 10 since the dissolution process is self-stopping, the content of voids, and thus the dielectric properties, and in particular the refractive index of each silicon layer can be finely tuned by a proper setting of the process parameters.…”
Section: Introductionmentioning
confidence: 99%