2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers) 2021
DOI: 10.1109/transducers50396.2021.9495378
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Fabrication and Characterization of 3D Microelectrode Arrays (3D MEAS) with Tri-Modal (Electrical, Optical, and Microfluidic) Interrogation of Electrogenic Cell Constructs

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Cited by 4 publications
(7 citation statements)
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“…250 μm diameter SS needles (Lhasa Ohm, MA) were cut to a height of 2.25 mm, utilizing a custom infrared (IR) laser-scribing approach (Quik Laze 50ST2; Eolite Lasers, OR). Ten needles per device were subsequently inserted from the backside of the device, utilizing a magnetic insertion approach, 48 to define the final height of the needles above the surface of the substrate at ∼500 μm.…”
Section: Methodsmentioning
confidence: 99%
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“…250 μm diameter SS needles (Lhasa Ohm, MA) were cut to a height of 2.25 mm, utilizing a custom infrared (IR) laser-scribing approach (Quik Laze 50ST2; Eolite Lasers, OR). Ten needles per device were subsequently inserted from the backside of the device, utilizing a magnetic insertion approach, 48 to define the final height of the needles above the surface of the substrate at ∼500 μm.…”
Section: Methodsmentioning
confidence: 99%
“…After laser ablation, the final microelectrode was determined to be ∼35 μm 2 in size and presented a 1 kHz impedance of 10.2 ± 3.47 kΩ that is closer to other literature-reported MEA values. 28,48,72 The final ∼35 μm 2 -sized 3D microelectrode was subsequently fitted with a modified Randles equivalent circuit to simulate and extract relevant parameters of interest (Figure 8A,D). Typically, a Randles circuit is comprised of the solution resistance (R S ), charge transfer resistance (R CT ), double layer capacitance (C DL ), and Warburg diffusion element (σ).…”
Section: Impedimetric Performance Of Fabricated 3dmentioning
confidence: 99%
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“…[85] Additionally, the combination of microfluidic technology with 3D MEA allows for simultaneous in vitro detection and guided neuronal growth. [86,87] Due to the current absence of widely adopted styles and fabrication processes for 3D MEAs, and the fact that planar electrodes are still the most commonly used for in vitro models, research on planar electrodes remains the primary focus at present.…”
Section: In Vitro Mea For Hipsc-dnsmentioning
confidence: 99%
“…additionally enable robust neural spheroid growth. Previously, MPS approaches utilizing accessible material/insulation strategies, which retain optical clarity (e.g., PDMS) have been explored [3,10,11]. Herein we explore an electron-beam sublimation of nanoporous silicon dioxide (SiO2) technology onto polycarbonate (PC) substrate and 316L stainless-steel (SS) microelectrode materials [11] using PDA to stabilize adhesion.…”
Section: Introductionmentioning
confidence: 99%