2022
DOI: 10.1541/ieejsmas.142.110
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Fabrication and Characteristics of Electret using Fine Silica Powder and Its Application of Ultrasonic Sensor

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Cited by 5 publications
(21 citation statements)
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“…The AE sensor was fabricated in the same way as a previously reported electret sensor used to measure AE in plants 4,7 . Configuration of ECS element and close‐up view of micro‐gap are shown in Figure 2.…”
Section: Experimental Methodsmentioning
confidence: 99%
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“…The AE sensor was fabricated in the same way as a previously reported electret sensor used to measure AE in plants 4,7 . Configuration of ECS element and close‐up view of micro‐gap are shown in Figure 2.…”
Section: Experimental Methodsmentioning
confidence: 99%
“…The authors developed an electret‐based ultrasonic sensor (ECS: Electret Condenser Sensor) 4 . The concept of ECS is illustrated in Figure 1.…”
Section: Forewordmentioning
confidence: 99%
“…The electret electrode was fabricated by the same method that was used for insulation electrode in the previous research 10 . Specifically, PTFE layer was spin‐coated on an 11‐μm thick aluminum film.…”
Section: Experimental Methodsmentioning
confidence: 99%
“…There are studies on electret applications such as non‐woven fabrics used as aerosol filters to remove fine particles from the air and energy harvesting using porous polymer electrets to convert small vibrations into electric power 6,7 . We have done research on performance improvement of an electromechanical transducer made of an electret sandwich between two electrodes and called electret capacitor sensor (ECS) 8–10 . We also developed on an ECS with electret of colloidal silica formed by spraying or silica aggregate formed by spin‐coating of fine powder; in that ECS, electret is also used as a spacer to form micro‐gaps 9,10 .…”
Section: Introductionmentioning
confidence: 99%
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