Fabrication and calibration of Pt–10%Rh/Pt thin film thermocouples

Microstructure Evolution and Thermoelectric Property of Pt-PtRh Thin Film Thermocouples

“…As a result, the Seebeck coefficient of TFTC was well preserved. Due to the same mechanism, vacuum annealing-which is also helpful to introduce surface segregation of rhodium-was proven to be helpful for the stability enhancement of type S TFTC [4]. Furthermore, both of the TFTCs survived after several calibration cycles, meaning that the lifetime of both TFTCs is more than 20 h in highly oxidized environment with severe temperature ramps.…”

“…In sharp contrast to traditional thermocouple wires, thin film thermocouples (TFTCs) can be directly deposited onto the measured components with a thickness of less than 30 µm. Due to their negligible mass and volume, TFTCs can provide much faster response with minimal disturbance of the gas flow over the surface and almost no impact on the physical characteristics of the measured components [1][2][3][4][5][6][7][8][9]. Metallic-based wire thermocouples such as Pt-PtRh or NiCr-NiSi have been widely applied for decades.…”

“…However, when deposited in thin film form, the stability and linearity of TFTC is subject to different degrees of degradation-especially in the high temperature range and in highly oxidizing environments [8,10]. Different approaches have been taken to optimize the stability and thermoelectric performance of such metallic TFTCs [4,10,11]. It has been reported that vacuum annealing could increase the sensitivity and stability of Pt-PtRh TFTC, but the mechanism is still unclear.…”

Preparation and thermal volatility characteristics of In2O3/ITO thin film thermocouple by RF magnetron sputtering

“…[8][9][10] Noble metals have been developed to meet the harsh measurement, such as platinum, palladium, 10%Rh/Pt and iridium. [11][12][13][14] However, in the extreme environment with high temperature and strong air/oxygen gas flow, the metal-based thin film thermocouples are prone to oxidization or fall off from the substrate. They have to work as armored thermocouple with ceramics cannula to get the high temperature wear and corrosion protection at the expenses of slow response.…”

Stability and thermoelectric properties of ITON:Pt thin film thermocouples

“…Compared with conventional wire or foil sensors, thin film thermocouples (TFTC) can provide more accurate measurements with faster response due to lower thermal mass. Meanwhile, since thin film sensors are directly deposited onto the measured components with whole thickness less than 30 lm, it creates minimal disturbance of the gas flow over the surface and negligible influence on the surface temperature distribution of the measured components [1][2][3]. However, the materials used in traditional thermocouples, such as Rhodium, cannot offer stability at temperatures above 900°C due to severe oxidation.…”