Fabrication 3D buried channel optical waveguide modulators on field-driven ion exchange process

Zhou, Zigang; Chen, Wenqiang; Zhu, Li; Li, Jing; Luo, Xiaoying

doi:10.1117/12.863592

SPIE Proceedings

2010

DOI: 10.1117/12.863592

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Fabrication 3D buried channel optical waveguide modulators on field-driven ion exchange process

Zigang Zhou

Wenqiang Chen

Li Zhu

et al.

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Fabrication 3D buried channel optical waveguide modulators on field-driven ion exchange process

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