Fabricating of aspheric micro-lens array by excimer laser micromachining

Chiu, Chi Cheng; Lee, Yung-Chun

doi:10.1016/j.optlaseng.2011.04.011

Cited by 37 publications

(18 citation statements)

References 15 publications

(14 reference statements)

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“…Chiu and Lee (2011) demonstrated a unique method for fabricating aspheric micro-lens array based on a KrF 248 nm excimer laser micromachining with precise surface profile control. Although many conventional methods are widely used for fabrication of micro-lens array, a common problem shared by all these methods is that the micro-lens surface profile is not accurately controllable.…”

Section: Fabrication Of Micro Lens Arraymentioning

confidence: 99%

Lasers Based Manufacturing

Joshi¹,

Dixit²

2015

Topics in Mining, Metallurgy and Materials Engineering

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Section: Fabrication Of Micro Lens Arraymentioning

confidence: 99%

Lasers Based Manufacturing

Joshi¹,

Dixit²

2015

Topics in Mining, Metallurgy and Materials Engineering

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“…Various microlenses and microarray structures have been fabricated in a range of substrates using techniques, such as photolithography/reactive ion etching [3][4][5][6][7], surface tension-based curing [10,11], laser ablation, engraving and thermal expansion [8,9,[12][13][14], thermal reflow [15,16], embossing [17,18] and inkjetting [19,20]. Of these fabrication processes, CO 2 laser engraving is an attractive alternative to established micro-manufacturing techniques for the production of optical components, and such a technology has a rapid turnaround time and does not require fixed photomasks, embossing tools or a clean room environment and is suited to polymer manufacturing, a substrate most commonly used for the fabrication of various microsystems [8,9,[21][22][23][24][25].…”

Section: Open Accessmentioning

confidence: 99%

CO2 Laser Manufacturing of Miniaturised Lenses for Lab-on-a-Chip Systems

Mohammed

Desmulliez

2014

Micromachines

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This article describes the manufacturing and characterisation of plano-convex miniaturised lenses using a CO 2 laser engraving process in PMMA substrates. The technique allows for lenses to be fabricated rapidly and in a reproducible manner at depths of over 200 µm and for lens diameters of more than 3 mm. Experimental characterisation of the lens focal lengths shows good correlation with theory. The plano-convex lenses have been successfully embedded into capillary microfluidic systems alongside planar microlenses, allowing for a significant reduction of ancillary optics without a loss of detection sensitivity when performing fluorescence measurements. Such technology provides a significant step forward towards the portability of fluorescence-or luminescence-based systems for biological/chemical analysis.

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“…For this reason, various fabrication methods of micro-lens arrays are also researched and developed very eagerly, and new methods are frequently proposed one after another. Representative methods are thermal reflow of resist or plastic materials [13,14], etching of glass or plastic materials [15,16], ink-jetting of lens materials [17,18], tracking of laser light [19,20], gray scale lithography [21,22], and embossing [23,24]. What fabrication method is appropriate depends on the applications or necessary lens parameters and sizes.…”

Section: Introductionmentioning

confidence: 99%

Fabrication of Concave Resist Patterns for the Use of Reversal Molds of High-Density Micro-Lens Arrays

Horiuchi

Sasaki

2016

J. Photopol. Sci. Technol.

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Almost spherical concave resist patterns in a dense array were fabricated to be used as reversal molds of plastic convex micro-lens arrays. In the past research, such micro-lens arrays were replicated using concave metal molds fabricated by replicating original convex resist patterns. However, it was difficult to fabricate the original convex resist patterns densely in a matrix. In addition, because two replication processes from resist to metal and from metal to plastic resin were necessary, procedures were very complicated, and it took long times for obtaining final plastic resin lens arrays. In the new method, original concave mold patterns were obtained by simple 1/19 projection-exposure lithography including only one exposure and one development by applying largely defocused exposure intentionally. Despite the simplicity, very wide-range curvature radiuses of 25-120 μm were obtained by giving various exposure doses even using reticles with same 500-μm transparent square patterns. It was basically checked that epoxy resin lens arrays were obtained by mechanically separating them from the concave resist molds.

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Fabricating of aspheric micro-lens array by excimer laser micromachining

Cited by 37 publications

References 15 publications

Lasers Based Manufacturing

Lasers Based Manufacturing

CO2 Laser Manufacturing of Miniaturised Lenses for Lab-on-a-Chip Systems

Fabrication of Concave Resist Patterns for the Use of Reversal Molds of High-Density Micro-Lens Arrays

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