Fabricating a Highly Sensitive QCM Sensor Using AAO Nanoholes and Its Application for Biosensing

Abstract

A nanostructure composed of Anodic Aluminum Oxide (AAO) was obtained on an electrode of a quartz crystal microbalance (QCM) chip by anodizing Al thin film in an oxalic acid solution. The effective surface area was expanded by these nanostructures. Several morphologies were observed under various anodic conditions by using scanning electron microscopy (SEM). We demonstrated that a QCM chip with the AAO was effective in biosensing because of its large surface area. The frequency shift corresponding to an antigen-antibody reaction improved on the nanostructured electrode compared with a flat surface electrode.