Fabricación y caracterización de películas transparentes y conductoras utilizadas como contactos en estructuras MIM con películas SRO-LPCVD y SRO-HFCVD sobre sustrato de cuarzo
Abstract:This work presents the manufacturing and characterization process of two types of transparent conductive oxide (TCO) films, as contacts. Aluminum doped zinc oxide (AZO) deposited with the Sputtering technique and tin doped indium oxide (ITO) using the pyrolysis spray technique, these transparent and conductive films were deposited as contacts on a film of siliconrich oxide (SRO) which was deposited by two systems of chemical vapor deposition by low-pressure (LPCVD) and by hotfilament (HFCVD) on quartz substrat… Show more
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