F-0521 Abrasive Water Jet Process for Micro Fabrication on Quartz Glass

Matsumura, Takashi; Muramatsu, Tetsuya; Shirakashi, Takahiro

doi:10.1299/jsmemecjo.vi.01.1.0_13

The Proceedings of the JSME Annual Meeting

2001

DOI: 10.1299/jsmemecjo.vi.01.1.0_13

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F-0521 Abrasive Water Jet Process for Micro Fabrication on Quartz Glass

Takashi Matsumura

Tetsuya Muramatsu

Takahiro Shirakashi

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F-0521 Abrasive Water Jet Process for Micro Fabrication on Quartz Glass

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