Extremely short external cavity semiconductor laser: profilometry via wavelength tuning

Aikio, Janne; Howe, Dennis G.

doi:10.1109/cleo.2001.948074

Cited by 2 publications

(18 citation statements)

References 0 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…For external cavity, the effective reflectance is used to describe the effect of the external reflector [2,[11][12].…”

Section: Materials and Fabrication Methodsmentioning

confidence: 99%

“…The rapid progress of the MEMS technology allows for miniaturization of a bulky tunable laser, improvement of the tuning speed and the mechanical reliability at lower fabrication cost. Designs based on the simple ECTL with a movable external mirror suffer from the tradeoff between tuning range and side mode suppression SMS [2,3,[11][12][13]. So we present a model that compensates between the tuning range and SMS taking into account the diffraction effects for the light between laser facet and external mirror, and tuning range calculations.…”

Section: Introductionmentioning

confidence: 99%

See 1 more Smart Citation

A Dual Cylindrical Tunable Laser Based on MEMS

Fawzy¹,

Elghandour²,

Hamed³

2016

ijacsa

View full text Add to dashboard Cite

Abstract-Free space optics is considered the topic of the day and have a large variety of applications which free space separates source from destination such as External cavity tunable laser (ECTL). In ECTL, laser source emits Gaussian beam that propagates in plane with substrate until reach external reflector. The efficiency of these applications depends on the amount of light that coupled back to the laser, called coupling efficiency. Increasing coupling efficiency depends on using assembled lens's or any optical part in the path between laser front facet and external reflector, which result in increasing the cost and integration effort. We innovate here anew configuration of external cavity tunable laser based on cylindrical (curved) Mirrors. The usage of cylindrical mirror affects on the amount of light that coupled back to laser and that decreases the alignment requirement in the laser assembly as compared to another configurations based on flat mirror. The fabrication of cylindrical mirror is simple with respect to spherical mirror so it can be used in batch fabrication. Tuning achieved by using micro electro mechanical system MEMS technology. The system consists of a laser cavity and a two filter cavities for wavelength selection. The formation of cylindrical microstructures were made into the substrate volume. So we report also the micromachining method that used for fabricating the cylindrical mirror. Anisotropic etching and the deep reactive ion etching (DRIE) are especially useful for the batch fabrication of large optical mechanical devices. The characteristics of the laser's spectral response versus laser facet reflectance variations are described via simulations. The diffraction of light in ECTL formed by the laser front facet and the external reflector are taken into account. Here we report all things about the model including the fabrication steps and simulation analysis.

show abstract

“…For external cavity, the effective reflectance is used to describe the effect of the external reflector [2,[11][12].…”

Section: Materials and Fabrication Methodsmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

A Dual Cylindrical Tunable Laser Based on MEMS

Fawzy¹,

Elghandour²,

Hamed³

2016

ijacsa

View full text Add to dashboard Cite

show abstract

“…It happens mostly in multimode lasers. Many works did not tell the difference in claiming the wavelength tuning range [2,3,[24][25][26][27][28][29][30][31][32]. For the same amount of continuous shift and mode hopping, the technical difficulties are quite different.…”

Section: Introductionmentioning

confidence: 99%

“…With the progress of MEMS fabrication capability from wet etching, surface micromachining to deep reactive ion etching (DRIE) [39][40][41], MEMS tunable lasers have evolved from simple to complicated, from non-continuous tuning to continuous tuning, from a small to a large tuning range, from hybrid integration to single-chip integration, etc [1][2][3]. Various configurations have been demonstrated [24][25][26][27][28][29][30][31][32], differing in many aspects of the external cavity such as the external reflectors (i.e., mirrors, etalons, gratings, etc), optical coupling systems, laser chips (normally cleaved or coated) and integration methods (single-chip or hybrid). Some are simple copycat but a miniaturized version of conventional lasers [3], while the others present something new to a certain extent [1,2,[24][25][26][28][29][30][31].…”

Section: Introductionmentioning

confidence: 99%

“…Various configurations have been demonstrated [24][25][26][27][28][29][30][31][32], differing in many aspects of the external cavity such as the external reflectors (i.e., mirrors, etalons, gratings, etc), optical coupling systems, laser chips (normally cleaved or coated) and integration methods (single-chip or hybrid). Some are simple copycat but a miniaturized version of conventional lasers [3], while the others present something new to a certain extent [1,2,[24][25][26][28][29][30][31]. In terms of theory, although the MEMS tunable lasers follow the same principles as the conventional bulky counterparts, laser theories and designs should be reexamined since some parameters cannot be simply scaled down.…”

Section: Introductionmentioning

confidence: 99%

See 1 more Smart Citation

A review of MEMS external-cavity tunable lasers

Liu¹,

Zhang²

2006

J. Micromech. Microeng.

122

View full text Add to dashboard Cite

The paper reviews the state-of-the-art of miniaturized tunable lasers constructed by microelectromechanical systems (MEMS) technology, covering various topics of laser configurations, theoretical studies and some design issues, with primary focus on the uniqueness of MEMS tunable lasers in comparison to conventional opto-mechanical counterparts. Further studies have also been presented to investigate the tuning range and stability in order to provide a deep understanding of the specialities of MEMS lasers in the sense of physics. The introduction of MEMS has endowed two special features to tunable lasers. One is that MEMS facilitates external cavities at very short (<100 µm) and even extremely short length (<10 µm), leading to unusual tuning behaviors and different design concerns. The other is that the photolithography of the MEMS process makes it possible to fabricate gratings/mirrors in arbitrary profiles, which may inspire the innovation of new laser configurations that can only be realized by MEMS technology. With further work on integration and packaging, MEMS lasers would be able to deliver their merits of small size, fast tuning speed, wide tuning range and IC integration compatibility, and to broaden their applications to many fields.

show abstract

Extremely short external cavity semiconductor laser: profilometry via wavelength tuning

Cited by 2 publications

References 0 publications

A Dual Cylindrical Tunable Laser Based on MEMS

A Dual Cylindrical Tunable Laser Based on MEMS

A review of MEMS external-cavity tunable lasers

Contact Info

Product

Resources

About