Extreme-temperature lab on a chip for optogalvanic spectroscopy of ultra small samples - key components and a first integration attempt

Abstract

Abstract. This is a short summary of the authors' recent R&D on valves, combustors, plasma sources, and pressure and temperature sensors, realized in high-temperature co-fired ceramics, and an account for the first attempt to monolithically integrate them to form a lab on a chip for sample administration, preparation and analysis, as a stage in optogalvanic spectroscopy.