Extraordinary optical transmission of periodic array of subwavelength holes within titanium nitride thin film

Shabani, Alireza; Roknabadi, Mahmood Rezaee; Behdani, Mohammad; Nezhad, Mehdi Khazaei; Rahmani, Neda

doi:10.1117/1.jnp.11.036006

Cited by 9 publications

(9 citation statements)

References 40 publications

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“…This behavior was seen in transparent conducting oxide (TCO) family, especially in the cases of Al/Ga-doped zinc oxide. [11][12][13][14][15] The maximum performance of each family is limited to a particular spectral region. For instance, TCOs exhibit plasmonic behavior in the near-infrared (NIR) regime, due to the low carrier concentration and subsequently small ω p , whereas nitrides have the optical properties similar to the Ag and Au with plasmonic behavior at visible region.…”

Section: Introductionmentioning

confidence: 99%

Zirconium Nitride: Optical Properties of an Emerging Intermetallic for Plasmonic Applications

Shabani

Korsa

Petersen

et al. 2021

Advanced Photonics Research

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Finding new plasmonic materials with prominent optical properties and unique physical and chemical characteristics, which are merits of traditional gold and silver, is of great interest to many applications. This work uses a series of powerful numerical methods, such as density functional theory (DFT) and electromagnetic modeling approaches, to predict the plasmonic response of a mechanically well‐known material, zirconium nitride (ZrN). DFT first delivers an electronic analysis and optical dispersion data between 1 and 8 eV, experimentally verified in the lower energy regime (), and extremely valuable for any subsequent optical modeling. Subsequent electromagnetic modeling steps, including the transfer matrix method (TMM) and Mie theory, demonstrate the excitation of surface plasmon polaritons and localized surface plasmon resonances in ZrN thin films and nanoparticles. Furthermore, the finite‐difference time‐domain (FDTD) method exhibits the excitation of distinct electric (plasmon) and magnetic (LC) resonances in a periodic array of u‐shaped ZrN split‐ring resonators (SRRs). The findings showcase an optical behavior comparable with structures made from noble metals such as gold and silver and support the introduction of ZrN as a new and appropriate candidate for plasmonic applications, specifically in technological applications where optical and mechanical properties are of simultaneous concern.

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Section: Introductionmentioning

confidence: 99%

Zirconium Nitride: Optical Properties of an Emerging Intermetallic for Plasmonic Applications

Shabani

Korsa

Petersen

et al. 2021

Advanced Photonics Research

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“…The resonance frequency of the square nanohole array EOT surface is governed by the following eq : λ normalE normalO normalT = Λ i 2 + j 2 ε normald ε normalm ε normald + ε normalm where Λ represents the period, ε represents dielectric constants of metallic and dielectric media, and i and j represent diffraction orders. Shabani et al present a relation between resonance wavelength and properties of TiN EOT devices through FDTD simulations . They consider different geometrical and material properties and compare these cases by following the shift in the transmission peak; thus, they report similar results to the above equation .…”

Section: Results and Discussionmentioning

confidence: 89%

“…Shabani et al present a relation between resonance wavelength and properties of TiN EOT devices through FDTD simulations . They consider different geometrical and material properties and compare these cases by following the shift in the transmission peak; thus, they report similar results to the above equation . The performance of the TiN-based devices is highly dependent on the fabrication process.…”

Section: Results and Discussionmentioning

confidence: 96%

“…This EOT behavior agrees with the findings of Shabani et al, showing surface plasmons from the oscillation of free electrons at the intermetallic and dielectric interface support EOT with tunable optical behavior. 23 The sensing performance of EOT devices is affected by the physical features of the metal surface since plasmons propagate at the metal−dielectric interface. Therefore, controlling the surface morphology and roughness is crucial for high EOT sensitivity.…”

Section: Acs Appliedmentioning

confidence: 99%

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Plasmonic Titanium Nitride Nanohole Arrays for Refractometric Sensing

Günaydın,

Gülmez,

Torabfam

et al. 2023

ACS Appl. Nano Mater.

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Group IVB metal nitrides have attracted great interest as alternative plasmonic materials. Among them, titanium nitride (TiN) stands out due to the ease of deposition and relative abundance of Ti compared to those of Zr and Hf metals. Even though they do not have Au or Ag-like plasmonic characteristics, they offer many advantages, from high mechanical stability to refractory behavior and complementary metal oxide semiconductor-compatible fabrication to tunable electrical/optical properties. In this study, we utilized reactive RF magnetron sputtering to deposit plasmonic TiN thin films. The flow rate and ratio of Ar/N 2 and oxygen scavenging methods were optimized to improve the plasmonic performance of TiN thin films. The stoichiometry and structure of the TiN thin films were thoroughly investigated to assess the viability of the optimized operation procedures. To assess the plasmonic performance of TiN thin films, periodic nanohole arrays were perforated on TiN thin films by using electron beam lithography and reactive ion etching methods. The resulting TiN periodic nanohole array with varying periods was investigated by using a custom microspectroscopy setup for both reflection and transmission characteristics in various media to underline the efficacy of TiN for refractometric sensing.

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“…Therefore, the minimal gap size in all the suggested structures was presumed to be 5 nm to have a topology that could be easily lifted in the fabrication process. It is a prevalent method that uses 5 nm, and even less than 5 nm gap and thickness use from 50nm to 20nm to construct plasmonic devices [28,[30][31][32][33][34][35][36][37]. The design of plasmonic filters included two linked resonators with 5 nm of coupling space [30].…”

Section:   mentioning

confidence: 99%

A theoretical study of broadband extraordinary optical transmission in gold plasmonic square nanohole arrays and its application on refractive index sensor

et al. 2022

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Extraordinary optical transmission (EOT) behaviour is investigated in a subwavelength plasmonic nanostructure, consisting of a gold film perforated with a square nanohole array and deposited on a silicon dioxide substrate. The essential aspect of the proposed structure is the periodic disorder that enables broadband transmission peaks in the visible and near-infrared region and reduces the structure's size, which mainly arises from the excitation of localized surface plasmon resonances (LSPRs). Optical cavity modes formed in the nanoholes and the hybridization of plasmon modes. Further, the performance of the proposed nanostructure as a plasmonic sensor is analyzed by increasing the index of refraction of the local environment; the EOT exhibit remarkable refractive index sensitivity of up to 944 nm/RIU, a figure of merit of 9.25 and a contrast ratio of 47% are realized. The proposed structure has some practical significance for designing low-cost and effective sensing devices.

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Extraordinary optical transmission of periodic array of subwavelength holes within titanium nitride thin film

Cited by 9 publications

References 40 publications

Zirconium Nitride: Optical Properties of an Emerging Intermetallic for Plasmonic Applications

Zirconium Nitride: Optical Properties of an Emerging Intermetallic for Plasmonic Applications

Plasmonic Titanium Nitride Nanohole Arrays for Refractometric Sensing

A theoretical study of broadband extraordinary optical transmission in gold plasmonic square nanohole arrays and its application on refractive index sensor

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