Extended-field electromagnetic model for inductively coupled plasma

Abstract

An extended-field (EF), two dimensional (2D) model formulation is proposed for inductively coupled plasma. By extending the calculating domain of the electromagnetic (EM) field outside of the plasma discharge region, the boundary conditions of vector potential used by the standard (ST) 2D model are replaced by simpler far field boundary conditions. The extended model converges faster than the standard formulation and gives rise to consistent solutions throughout the computational domain. Vector potential equations are solved with corresponding continuity, momentum, and energy transfer equations using the commercial code `FLUENT'. The computational domain for vector potential equations are extended well beyond the induction coil region, while for all the other equations, computations are limited to the discharge region inside the plasma confinement tube. The computational results are compared with those obtained using the ST 2D model. The difference between the results of the two models is noted mostly in the entrance regions of the flow, and close to the induction coil. To validate the EF model, a load with constant electric conductivity is placed centrally in the coil region and the calculated radial profile of the axial magnetic field is compared with existing analytical solutions. The results are in good agreement within an uncertainty of 1%.

Magnetic field approaches in dc thermal plasma modelling

“…However, at the same time, this simple case does not consider a current density variation in axial or radial directions and only the axial component was considered. It is known that the distance of the boundary condition from the conducting zone can affect the accuracy of the results [12][13]. This point will be studied further in the geometry involving the electric arc.…”

“…This specific condition cannot be reached in all models (problems in constricted parts and necessity to assume a large calculation domain). This point has been studied by some authors in RF plasmas configurations where people propose to calculate the magnetic field in an extended domain [12] [13] or by B&S equations [12]. In AC/DC, in order to overcome this problem, the authors very often consider a null flux as boundary condition for vector potential components at the modelled geometry edges [9][10] or a value equal to zero if the boundary is far from the arc [6][7][8].…”

Modeling and Simulation of Inductively Coupled Plasma ICP

“…Thermal plasmas are assumed to be under partial to complete local thermodynamic equilibrium (LTE) conditions. Under LTE, the plasma can be considered a conductive fluid mixture and therefore, be modeled using the magnetohydrodynamics (MHD) equations, [1]. This model shows how to use the equilibrium inductively coupled discharge interface to simulate the plasma generated in an inductively coupled plasma, [1]- [2].…”

“…Under LTE, the plasma can be considered a conductive fluid mixture and therefore, be modeled using the magnetohydrodynamics (MHD) equations, [1]. This model shows how to use the equilibrium inductively coupled discharge interface to simulate the plasma generated in an inductively coupled plasma, [1]- [2]. The main objective of this work is to investigate: the effect of Increasing number of turns in a coil and the effect of electrical current both on the plasma temperature distribution, and the electron density of the argon plasma II.…”

The effect of various coil parameters on ICP torch simulation

“…al. [19] proposed a novel 2D model to study the influence of coil angle on temperatures and flow field. The results indicated that the influence of coil angle on temperature and flow field does not have noticeable change.…”