2018
DOI: 10.1002/ctpp.201700084
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Extended DC arc atmospheric pressure plasma source for large scale surface cleaning and functionalization

Abstract: Plasma technologies at atmospheric pressure (AP) promise efficient integration into industrial manufacturing technology and save considerable investment and maintenance costs. The development of new fields of application of AP techniques increasingly requires the provision of adapted, large‐area plasma sources. The linearly extended direct current (DC) arc plasma source, long arc generator principle (LARGE) for short, with a working width of up to 350 mm was developed at the Fraunhofer IWS for the large area p… Show more

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Cited by 3 publications
(1 citation statement)
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“…At the same time, the presence of surface contaminants, such as oil, dust and residue formed by previous coating, will directly affect the vacuum degree and increase the possibility of film failure. In industry, the physical action of plasma is often used to remove contaminants from the surface of copper [3][4][5][6]. However, little is known about the effect of different plasmas on the cleaning efficiency and surface of copper.…”
Section: Introducementioning
confidence: 99%
“…At the same time, the presence of surface contaminants, such as oil, dust and residue formed by previous coating, will directly affect the vacuum degree and increase the possibility of film failure. In industry, the physical action of plasma is often used to remove contaminants from the surface of copper [3][4][5][6]. However, little is known about the effect of different plasmas on the cleaning efficiency and surface of copper.…”
Section: Introducementioning
confidence: 99%