2022
DOI: 10.1016/j.triboint.2022.107840
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Exploring the nano-polishing mechanisms of Invar

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Cited by 11 publications
(3 citation statements)
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References 78 publications
(90 reference statements)
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“…The components of MEMS scrape against each other frequently while working. To investigate the effects of scraping velocity on nickel-copper substrate, we set five translation velocities and five rotation velocities according to [29,30] and the characteristic of model in this paper. Rolling scraping occurs between abrasive and substrate when translation velocity is equal to rotation velocity.…”
Section: Effects Of Abrasive Velocitymentioning
confidence: 99%
“…The components of MEMS scrape against each other frequently while working. To investigate the effects of scraping velocity on nickel-copper substrate, we set five translation velocities and five rotation velocities according to [29,30] and the characteristic of model in this paper. Rolling scraping occurs between abrasive and substrate when translation velocity is equal to rotation velocity.…”
Section: Effects Of Abrasive Velocitymentioning
confidence: 99%
“…To balance the efficiency of the grinding process with the surface quality, a compromise has to be made between the material removal rate and the final surface roughness (Stephenson et al, 2001;Gopal and Rao, 2003). Higher material removal rates, resulting for example from higher grinding speeds, usually deteriorate the surface quality (Wang et al, 2022), while high surface quality is usually achieved by using small pressures and low material removal rates. If the grinding parameters are carefully chosen, roughness values in the range of 0.3 nm with an accuracy of 10 nm of geometrical features can be achieved in ultra-precision processes, thus making any subsequent polishing processes unnecessary (Wegener et al, 2017).…”
Section: Introductionmentioning
confidence: 99%
“…Grinding is an extremely complicated process, which is affected by a number of parameters, such as the material of the abrasives and the work piece as well as their microstructure, the pressure, the temperature, the geometry and orientation of the abrasives, as well as the cutting speed and other machine parameters (Gopal and Rao, 2003;Eder et al, 2022;Wang et al, 2022). Often the correct operation of the grinding process can be determined by the existence and the shape of the formed chips (Rasim et al, 2015;Karasawa et al, 2019).…”
Section: Introductionmentioning
confidence: 99%