Exploring the mechanism of gallium nitride surface quality enhancement by green organic additives in chemical mechanical polishing

Xian, Wenhao; Zhang, Baoguo; Liu, Min; Cui, Dexing; Liu, Shitong

doi:10.1016/j.apsusc.2024.160646

Applied Surface Science

2024

DOI: 10.1016/j.apsusc.2024.160646

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Exploring the mechanism of gallium nitride surface quality enhancement by green organic additives in chemical mechanical polishing

Wenhao Xian,

Baoguo Zhang,

Min Liu

et al.

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Exploring the mechanism of gallium nitride surface quality enhancement by green organic additives in chemical mechanical polishing

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References 40 publications

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