2024
DOI: 10.1088/1361-6641/ad69ba
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Exploring low temperature-sputtered indium tin oxide (ITO) as an anti-reflection layer for silicon solar cells

Zon Fazlila Mohd Ahir,
Ahmad Rujhan Mohd Rais,
Norasikin Ahmad Ludin
et al.

Abstract: This paper tackles challenges in silicon (Si) solar cells, specifically the use of hazardous Phosphorus Oxychloride (POCl3) for emitter formation and silane/ammonia for the Anti-Reflective Coating (ARC) layer, accompanied by high-temperature metallization. The study proposes an eco-friendly ARC layer process, replacing toxic materials. Indium Tin Oxide (ITO) with a refractive index of ~2.0 is suggested as a non-toxic substitute for SiNx in the ARC layer. ITO enables fine-tuning of optical parameters and, with … Show more

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