Exploiting spatial characteristic of wafer for effective OCW: area partitioning OCW

Abstract

Optimal color weighting (OCW) is a promising technique to improve accuracy and robustness of alignment mark measurement in the lithography process. Measurement based OCW shows remarkable improvement of overlay error under laboratory conditions. In those conditions, one of the wafer processes is split and a simple form of mark deformation is present. However, the OCW effect has not been confirmed in the case of on-product overlay since various of deformations are mixed in the real FAB. We perform simple simulation showing that mixed deformations can deteriorate the performance of OCW and show that utilizing spatial characteristics of the wafer with OCW further improves the overlay error. As a result, we have improved on-product-overlay form 3.78 nm to 3.51 nm or 7.1% using data of 86 lots, 268 wafers in DUV layer of 3 nm logic device.