Exploitation of non-linearities in CMOS-NEMS electrostatic resonators for mechanical memories

Uranga, A.; Verd, J.; Marigo, E.; Giner, J.; Munoz-Gamarra, J. L.; Barniol, N.

doi:10.1016/j.sna.2013.03.032

Cited by 59 publications

(40 citation statements)

References 24 publications

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“…The growing interest in this field is motivated by applications such as microrelays [Miao et al, 2011], switches [Wu et al, 2010], microvalves [Sutanto et al, 2007], MEMS/NEMS based memories [Uranga et al, 2013], filters [Ouakad & Younis, 2014], etc. Bistable devices are capable of operating in more than one stable configuration for the same values of all effective geometrical and excitation parameters.…”

Section: Introductionmentioning

confidence: 99%

On the Chaotic Vibrations of Electrostatically Actuated Arch Micro/Nano Resonators: A Parametric Study

Tajaddodianfar

Yazdi

Pishkenari

2015

Int. J. Bifurcation Chaos

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Motivated by specific applications, electrostatically actuated bistable arch shaped micro-nano resonators have attracted growing attention in the research community in recent years. Nevertheless, some issues relating to their nonlinear dynamics, including the possibility of chaos, are still not well known. In this paper, we investigate the chaotic vibrations of a bistable resonator comprised of a double clamped initially curved microbeam under combined harmonic AC and static DC distributed electrostatic actuation. A reduced order equation obtained by the application of the Galerkin method to the nonlinear partial differential equation of motion, given in the framework of Euler-Bernoulli beam theory, is used for the investigation in this paper. We numerically integrate the obtained equation to study the chaotic vibrations of the proposed system. Moreover, we investigate the effects of various parameters including the arch curvature, the actuation parameters and the quality factor of the resonator, which are effective in the formation of both static and dynamic behaviors of the system. Using appropriate numerical tools, including Poincaré maps, bifurcation diagrams, Fourier spectrum and Lyapunov exponents we scrutinize the effects of various parameters on the formation of chaotic regions in the parametric space of the resonator. Results of this work provide better insight into the problem of nonlinear dynamics of the investigated family of bistable micro/nano resonators, and facilitate the design of arch resonators for applications such as filters.

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Section: Introductionmentioning

confidence: 99%

On the Chaotic Vibrations of Electrostatically Actuated Arch Micro/Nano Resonators: A Parametric Study

Tajaddodianfar

Yazdi

Pishkenari

2015

Int. J. Bifurcation Chaos

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“…A two-port capacitive read-out with an integrated amplification circuit is used [5]. Our resonator is a clamped-clamped polysilicon beam resonator, 13 um long, 390 nm wide and 282 nm thick with fundamental resonance frequency at 21.3 MHz.…”

Section: A Cmos Integrated Clamped-clamped Nanobridgementioning

confidence: 99%

Enhancement of higher harmonics detectability in a nonlinear nanoresonator

Torres

Vidal-Álvarez

Uranga

et al. 2014

2014 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP)

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“…This miniature element is one of the most essential electromechanical structural components that is highly potential for developing nanoscale resonators [2], switches [3], memories [4] and sensors [5]. A typical nanobridge is constructed from a movable conductive beam, which can be excited via applying electrical force field.…”

Section: Introductionmentioning

confidence: 99%

Electromechanical instability of nanobridge in ionic liquid electrolyte media: influence of electrical double layer, dispersion forces and size effect

et al. 2015

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In this paper, the electromechanical response and instability of the nanobridge immersed in ionic electrolyte media is investigated. The electrochemical force field is determined using double-layer theory and linearized PoissonBoltzmann equation. The presence of dispersion forces, i.e., Casimir and van der Waals attractions are incorporated considering the correction due to the presence of liquid media between the interacting surfaces (three-layer model). The strain gradient elasticity is employed to model the size-dependent structural behavior of the nanobridge. To solve the nonlinear constitutive equation of the system, three approaches, e.g., the Rayleigh-Ritz method, Lumped parameter model and the numerical solution method are employed. Impacts of the dispersion forces and size effect on the instability characteristics as well as the effects of ion concentration and potential ratio are discussed.

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Exploitation of non-linearities in CMOS-NEMS electrostatic resonators for mechanical memories

Cited by 59 publications

References 24 publications

On the Chaotic Vibrations of Electrostatically Actuated Arch Micro/Nano Resonators: A Parametric Study

On the Chaotic Vibrations of Electrostatically Actuated Arch Micro/Nano Resonators: A Parametric Study

Enhancement of higher harmonics detectability in a nonlinear nanoresonator

Electromechanical instability of nanobridge in ionic liquid electrolyte media: influence of electrical double layer, dispersion forces and size effect

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