2006
DOI: 10.1016/j.mee.2005.11.012
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Experimental test chamber design for optics exposure testing and debris characterization of a xenon discharge produced plasma source for extreme ultraviolet lithography

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Cited by 20 publications
(11 citation statements)
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“…The samples were characterized by microanalysis measurements using atomic force microscopy ͑AFM͒, auger electron spectroscopy ͑AES͒, and scanning electron microscopy ͑SEM͒ techniques. The former experiments are detailed elsewhere, [13][14][15] and the latter are presented in this paper.…”
Section: Experimental Exposurementioning
confidence: 99%
“…The samples were characterized by microanalysis measurements using atomic force microscopy ͑AFM͒, auger electron spectroscopy ͑AES͒, and scanning electron microscopy ͑SEM͒ techniques. The former experiments are detailed elsewhere, [13][14][15] and the latter are presented in this paper.…”
Section: Experimental Exposurementioning
confidence: 99%
“…XCEED experimental efforts are performed toward characterizing a commercial-scale DPP EUV source, including fast ion debris, debris mitigation techniques, methods to mitigate damage to collector mirrors, and exploring the characteristics and the erosive effects on the collector mirror surfaces after the DPP EUV exposures, by microanalysis measurements using atomic force microscopy ͑AFM͒, auger electron spectroscopy ͑AES͒, x-ray diffraction ͑XRD͒/x-ray reflectivity ͑XRR͒, x-ray photoelectron spectroscopy ͑XPS͒, and scanning electron microscopy ͑SEM͒ techniques. The former experiments are detailed elsewhere, 11 and the latter are presented in this paper.…”
Section: Experiments Setupmentioning
confidence: 99%
“…The chamber allows characterization of optic samples at varying exposure times for normal and grazing incidence reflection angles. [9][10][11] All DPP mirror samples discussed here are placed 56 cm from pinch and exposed for 10 million pulses ͑ϳ11 h exposure͒ with debris mitigation present. Au, C, Mo, Si, and ML1 are exposed at normal incidence ͑mirror plane is ϳ80 deg to the incoming light vector͒, while Pd and Ru are exposed at ϳ 20-deg grazing incidence.…”
Section: Experiments Setupmentioning
confidence: 99%
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“…1 This system is equipped with various diagnostics tools such as an electrostatic spherical sector analyzer (ESA) , a Faraday cup, and a neutral detector to detect ejected debris such as ions, neutrals, and charged particles from the Z-pinch. 2 More detailed descriptions about the working principle, calibration scheme of the ESA, and neutral detector are in our previous report. 3 A triple probe was used to detect secondary plasma formed during the pulse.…”
Section: Introductionmentioning
confidence: 99%