Experimental study of ternary M-Zn-Se (M=W, Au, In, Ti) phase equilibria

Schwarz, R.; Mölle, Matthias; Studnitzky, Thomas; Goesmann, Fred; Schmid–Fetzer, Rainer

doi:10.1016/s0925-8388(96)02603-5

Cited by 5 publications

(1 citation statement)

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“…Figure 1 shows the isothermal section of the ternary system Ti-Zn-Se at 500 • C. A more detailed description of the investigation of the phase equilibria mentioned in this paper can be found in [4]. The diffusion path as determined from the bulk diffusion couple is depicted by the line of open circles, as detailed below.…”

Section: Interface Reactions Experimental Procedures and Resultsmentioning

confidence: 99%

Interface reactions and electrical properties of metal contacts (Ti, In, Au, W) on p-ZnSe

Goesmann

Mölle

Studnitzky

et al. 1998

Semicond. Sci. Technol.

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In this study interfacial reactions and electrical properties of Ti, In, Au and W on ZnSe are presented. The combination of these two aspects of contact formation is very useful for the assessment of contact preparation procedures. Firstly the thermodynamic equilibria in the ternary metal-Zn-Se systems were evaluated. Secondly bulk diffusion experiments on the metals on ZnSe crystals were performed. Thirdly the electrical properties of the metal-p-type ZnSe contacts were evaluated and correlated to the results of the phase equilibrium and diffusion studies.Ti and In form ohmic contacts on p-type ZnSe but the mechanism is different. With Ti an interface reaction occurs; with In a solution of surface contaminations in the liquid metal film seems probable. Au and W are not very useful as electrical contacts. Neither reacts with the semiconductor. Au yields irreproducible electrical properties; W contacts show a very bad adherence to the semiconductor.

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Section: Interface Reactions Experimental Procedures and Resultsmentioning

confidence: 99%