Abstract:Slide stability is key to the aerostatic guide in ultra-precise machines; thus, it has garnered plenty of attention. Macro-scale studies are commonplace, but micro- and nano-vibration issues require more attention. Microscope vibration is mainly caused by tiny changes in the fluid parameters of lubricating gas film, which is complex and has no verdict. In this case, slide-gas interaction should be considered. In this study, the widely used orifice-type restrictor was investigated for its nano-vibration perform… Show more
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