Experimental study of phase noise in FBAR resonators

Computation method for the short-term stability of quartz crystal resonators obtained from passive phase noise measures

“…f In our case, the decrease of L() f is not due to a permanent change, as can be observed in [11] after a burn-in process. Variation of the acoustic resonator noise according to the dissipated power has been already observed in BAW resonators (see [5], [12]) and more recently in film bulk acoustic resonators (FBARs) [13].…”

An integrated phase noise measurement bench for on-chip characterization of resonators and VCOs

“…Unlike many passive microwave resonators, BAW resonators may induce a 1/f noise component in the circuit. As an example, we have measured some years ago on a conventional phase noise bridge a 1/f phase noise component in FBAR resonators [8], and the measured phase noise level in these devices was sufficient to be the main noise contribution to an oscillator realized with one of these resonators. However, the same measurements performed in the same conditions on some new SMR resonators have given results much too close from the measurement noise floor to conclude on the noise contribution of these devices.…”

Frequency flicker of 2.3 GHz AlN-sapphire high-overtone bulk acoustic resonators

“…This behavior has already been observed for quartz-crystal resonators 10 and FBAR resonators. 15 Residual phase noise in the range of À110 to À130 dBrad 2 /Hz, yielding resonator fractional frequency fluctuations at the level of À205 to À225 dB/Hz, at 1 Hz Fourier frequency is measured. Similar results were obtained for the resonator HBAR2 with a slightly reduced dependence to input microwave power.…”

“…More recently, the fluctuation dissipation theorem was used to evaluate the contribution of internal damping of thickness fluctuations to the level of noise for bulk acoustic wave cavities. 13 In the presence of flicker, i.e., S u ðf Þ ¼ b À1 =f , the Allan deviation r yq (s), stability of the resonator frequency, i.e., the time-domain stability of an oscillator in which the resonator is the only source of frequency instability, is given from 15 In this article, we investigate the residual 1/f noise of high-Q AlN-Sapphire 2.3 GHz HBAR resonators. In Section II, the architecture of HBAR resonators is presented and S-parameter characterization is reported.…”