Experimental study of effective particle heating by a thermal plasma flow confined in a porous ceramic tube

Park, Dong-Wha; Honda, Takyua; Kanzawa, Atsushi

doi:10.1007/bf01016155

Cited by 2 publications

(1 citation statement)

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“…Various CF 4 decomposition techniques, such as combustion [8], thermal and microwave plasma [9,10], cryogenic condensation with distillation, absorption, pressure swing adsorption, and membrane separation [11][12][13] have been performed. Among them, the thermal plasma technique provides a high temperature environment of over several thousand degrees Celsius to enhance heat transfer and chemical reactions in the decomposition process [14]. In addition, it provides unique advantages such as rapid reaction time, abundant reactive species, large throughputs, and byproduct reduction, even in a relatively small reactor, compared with other decomposition techniques [15,16].…”

Section: Introductionmentioning

confidence: 99%

Numerical analysis of thermal plasma scrubber for CF₄ decomposition

Kim

Choi

2019

Plasma Sci. Technol.

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CF 4 gas emitted in the semiconductor and display manufacturing process is a very harmful greenhouse gas. It must be removed or converted safely due to its extreme toxicity. Although a CF 4 decomposition system using a thermal plasma scrubber was commercialized, its removal efficiency is limited. In this work, a numerical analysis of CF 4 decomposition in the thermal plasma scrubber was carried out in order to propose an efficient decomposition environment. The decomposition and recombination temperatures of CF 4 were analyzed using thermodynamic equilibrium calculations. The chemical reaction of CF 4 decomposition into carbon and fluorine gas was considered in this numerical analysis. The injection position and angle of the CF 4 were controlled in order to enhance the decomposition rate. The vertical injection of CF 4 near the torch exit improved the mixing of the CF 4 with the thermal plasma flame. In addition, it was confirmed that the high temperature region expanded due to a vortex generated by strong turbulence in the bottleneck-shaped reactor. As a result, it is revealed that the CF 4 injection location and the reactor configuration are the most important factors in improving the decomposition rate.

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