2021
DOI: 10.1140/epjp/s13360-021-01132-5
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Experimental studies on ablation characteristics of alumina after irradiation with a 193-nm ArF excimer laser

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Cited by 8 publications
(2 citation statements)
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“…The thermal-penetration depth determines the distance over which heat diffuses into the target material during the laser pulse, as a result of heat conduction. Its mathematical calculation formula is: 33 where L th is the thermal-penetration depth, D represents the thermal diffusivity, τ is the laser pulse width, and k , C , and ρ denote the thermal conductivity, specific heat capacity, and density, respectively.…”
Section: Resultsmentioning
confidence: 99%
“…The thermal-penetration depth determines the distance over which heat diffuses into the target material during the laser pulse, as a result of heat conduction. Its mathematical calculation formula is: 33 where L th is the thermal-penetration depth, D represents the thermal diffusivity, τ is the laser pulse width, and k , C , and ρ denote the thermal conductivity, specific heat capacity, and density, respectively.…”
Section: Resultsmentioning
confidence: 99%
“…For further discussion, the dependence of the ablation depth on the incident laser fluence was evaluated. Generally, two different ablation regimes are distinguished in ultrashort‐pulsed LAL, characterized by a logarithmic dependence of the ablation depth on the laser fluence [76–79] . At low laser fluences, the ablation rate is determined by the optical penetration depth δ opt (see Equation ).…”
Section: Resultsmentioning
confidence: 99%