Experimental proof of a theoretical relation for the probability of positive ion excitation by bombardment of solid surfaces with 12 keV Ar+ ions

The results of measurements of the positive secondary‐ion yield S+ and the sputtering efficiency γ at a primary‐ion energy of 12 keV under dynamical conditions are reported. He+, Ne+, Ar+, Kr+, and Xe+ions served as bombarding ions (Z1‐dependence). 14 elements are investigated (Z2‐dependence), and the sputtering yields S were added wherever they were available from the literature. The positive secondary ion yield decreases with increasing mass of the bombarding ions. Using the values of S, S+, and γ as functions of Z1 and Z2, the Schroeer model of adiabatic surface ionization is examined and the exponents n are determined by a quotient method. The different dependences of S and S+ are discussed on the basis of this model.

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Experimental proof of a theoretical relation for the probability of positive ion excitation by bombardment of solid surfaces with 12 keV Ar+ ions

Cited by 10 publications

References 6 publications

The Energy Distribution of Positive Secondary Ions Emitted from Metal and Semiconductor Targets Bombarded with 12 keV Ar+ Ions

The Energy Distribution of Positive Secondary Ions Emitted from Metal and Semiconductor Targets Bombarded with 12 keV Ar+ Ions

Secondary ion emission of transition metal carbides

Dependence of secondary ion emission on the mass of the bombarding ions (Z1-dependence)

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