Experimental modal analysis for microelectromechanical systems

Özdoğanlar, O. Burak; Hansche, Bruce D.; Carne, Thomas G.

doi:10.1007/bf02427903

Cited by 99 publications

(46 citation statements)

References 23 publications

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“…Second, the measured quality factor includes both structural and gas damping, ζ tot = ζ structure + ζ gas (8) where the subscripts "tot", "structure" and "gas" refer to the total, structural and gas quality factor or damping ratio. As noted in reference, 14 the quality factors for the same micro-cantilever cross section at different gap heights converge to a constant value at low pressures. The structural damping is independent of the gas size and is negligible compared to the gas damping at moderate and atmospheric pressures.…”

Section: Iiia Effects Of Structural Dampingsupporting

confidence: 58%

Simulations of Aerodynamic Damping for MEMS Resonators

Guo

Alexeenko

2009

39th AIAA Fluid Dynamics Conference

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Aerodynamic damping for MEMS resonators is studied based on the numerical solution of Boltzmann-ESBGK equation. A compact model is then developed based on numerical simulations for a wide range of Knudsen numbers. The damping predictions are compared with both Reynold equation based models and several sets of experimental data. It has been found that the structural damping is dominant at low pressures (high Knudsen numbers). For cases with small length-to-width ratios and large vibration amplitudes, the threedimensionality effects must be taken into account. Finally, an uncertainty quantification approach based on the probability transformation method has been applied to assess the influence of pressure and geometric uncertainties. The output probability density functions (PDF) of the damping ratio has been studied for various input PDF of beam geometry and ambient pressure.

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Section: Iiia Effects Of Structural Dampingsupporting

confidence: 58%

Simulations of Aerodynamic Damping for MEMS Resonators

Guo

Alexeenko

2009

39th AIAA Fluid Dynamics Conference

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“…The cantilever beam is widely used for measuring due to the clear implementation of boundary conditions associated with accuracy [24,25]. Methods based on modal properties utilize the resonance frequencies of the vibrating system.…”

Section: Introductionmentioning

confidence: 99%

Effect of Substrates on the Dynamic Properties of Inkjet-Printed Ag Thin Films

Kim¹,

Kwak²,

Park³

2018

Applied Sciences

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Abstract:The dynamic properties of inkjet-printed Ag thin films on flexible substrates were measured using flexural wave propagation. The Ag nanoparticle suspension was inkjet-printed on polyimide (PI), silicon wafer, and glass. The effects of flexible substrates on the dynamic properties of the films were investigated. Beam-shaped Ag-printed substrates were fabricated by pico-second laser pulse cutting. The wave approach was presented to analyze the vibrations of the thin film on the substrates. The Young's modulus and loss factor of the Ag thin films with the substrates were represented by the combined bending stiffness of the bilayer beam. The vibration response of the base-excited cantilever was measured using an accelerometer and laser Doppler vibrometer (LDV). Vibration transfers were analyzed to obtain dynamic characteristics of the Ag-printed bilayer beam. The substrate affects the reduction of the Ag thin film thickness during the sintering process and surface roughness of the film. The proposed method based on the wave approach allows measurement of the dynamic properties regardless of the ratio of the modulus between the thin film and substrate.

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“…Gas damping in micro-electro-mechanical systems (MEMS) has attracted a lot of interest in the past two decades [1][2][3][4][5][6]. Better understanding of gas damping effects on micro-structure dynamics gPC can be highly accurate and efficient.…”

Section: Introductionmentioning

confidence: 99%

Uncertainty quantification models for micro‐scale squeeze‐film damping

Guo

Xiu

et al. 2010

Numerical Meth Engineering

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SUMMARYTwo squeeze-film gas damping models are proposed to quantify uncertainties associated with the gap size and the ambient pressure. Modeling of gas damping has become a subject of increased interest in recent years due to its importance in micro-electro-mechanical systems (MEMS). In addition to the need for gas damping models for design of MEMS with movable micro-structures, knowledge of parameter dependence in gas damping contributes to the understanding of device-level reliability. In this work, two damping models quantifying the uncertainty in parameters are generated based on rarefied flow simulations. One is a generalized polynomial chaos (gPC) model, which is a general strategy for uncertainty quantification, and the other is a compact model developed specifically for this problem in an early work. Convergence and statistical analysis have been conducted to verify both models. By taking the gap size and ambient pressure as random fields with known probability distribution functions (PDF), the output PDF for the damping coefficient can be obtained. The first four central moments are used in comparisons of the resulting non-parametric distributions. A good agreement has been found, within 1%, for the relative difference for damping coefficient mean values. In study of geometric uncertainty, it is found that the average damping coefficient can deviate up to 13% from the damping coefficient corresponding to the average gap size. The difference is significant at the nonlinear region where the flow is in slip or transitional rarefied regimes.

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Experimental modal analysis for microelectromechanical systems

Cited by 99 publications

References 23 publications

Simulations of Aerodynamic Damping for MEMS Resonators

Simulations of Aerodynamic Damping for MEMS Resonators

Effect of Substrates on the Dynamic Properties of Inkjet-Printed Ag Thin Films

Uncertainty quantification models for micro‐scale squeeze‐film damping

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