Experimental measurement of plasmonic nanostructures embedded in silicon waveguide gaps

Espinosa-Soria, Alba; Griol, Amadeu; Martı́nez, Alejandro

doi:10.1364/oe.24.009592

Cited by 34 publications

(48 citation statements)

References 36 publications

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“…A lot of attention has been devoted in recent years to on-chip hybrid devices where plasmonic nanoantennas have been integrated with standard silicon nitride Si 3 N 4 photonic waveguides. [12][13][14][15][16][17][18][19][20] The transparency of silicon nitride extends towards the visible, thus making it an ideal platform for observing plasmon spectroscopy in the visible and near IR, i.e. the spectral range of interest for plasmonic nanostructures.…”

confidence: 99%

Hybrid dielectric waveguide spectroscopy of individual plasmonic nanoparticles

et al. 2017

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Plasmonics is a mature scientific discipline which is now entering the realm of practical applications. Recently, significant attention has been devoted to on-chip hybrid devices where plasmonic nanoantennas are integrated in standard Si3N4 photonic waveguides. Light in these systems is usually coupled at the waveguide apexes by using multiple objectives and/or tapered optical fibers, rendering the analysis of spectroscopic signals a complicated task. Here, we show how by using a grating coupler and a low NA objective, quantitative spectroscopic information similar to standard dark-field spectroscopy can be obtained at the single-nanoparticle level. This technology may be useful for enabling single-nanoparticle studies in non-linear excitation regimes and/or in complex experimental environments, thus enriching the toolbox of nanophotonic methods.

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confidence: 99%

Hybrid dielectric waveguide spectroscopy of individual plasmonic nanoparticles

et al. 2017

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“…Surface-enhanced Raman scattering (SERS) allows to dramatically increase the Raman signal from molecules in the close vicinity of plasmonic nano-antennas, even up to the limit of single-molecule detection [14]. Recent efforts succeeded in combining plasmonic antennas with Si [15] and SiN [16][17][18] waveguides, providing proof-of-concept experiments for integrated localized surface plasmon resonance (LSPR) sensing [18] and even waveguide-excited and -collected SERS [17]. However, all these approaches rely on multiple electron-beam lithography steps with critical alignment for writing both the waveguides and the nano-antennas.…”

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confidence: 99%

On-chip surface-enhanced Raman spectroscopy using nanosphere-lithography patterned antennas on silicon nitride waveguides

Wuytens¹,

Skirtach²,

Baets³

2017

Opt. Express

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Abstract:A hybrid integration of nanoplasmonic antennas with silicon nitride waveguides enables miniaturized chips for surface-enhanced Raman spectroscopy at visible and near-infrared wavelengths. This integration can result in high-throughput SERS assays on low sampling volumes. However, current fabrication methods are complex and rely on electron-beam lithography, thereby obstructing the full use of an integrated photonics platform. Here, we demonstrate the electronbeam-free fabrication of gold nanotriangles on deep-UV patterned silicon nitride waveguides using nanosphere lithography. The localized surface-plasmon resonance of these nanotriangles is optimized for Raman excitation at 785 nm, resulting in a SERS substrate enhancement factor of 2.5 × 10 5 . Furthermore, the SERS signal excited and collected through the waveguide is as strong as the free-space excited and collected signal through a high NA objective.

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“…Following the development of waveguide-based Raman spectroscopy [2][3][4], recent efforts successfully combined gold nano-antennas with dielectric photonic waveguides at visible wavelengths [5,6]. This led to first demonstrations of waveguide-based excitation and collection of surface-enhanced Raman scattering [6].…”

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confidence: 99%

Nanotriangle Decorated Silicon Nitride Waveguides for Integrated Surface-Enhanced Raman Spectroscopy

Wuytens

Skirtach

Baets

2017

Conference on Lasers and Electro-Optics

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Abstract:Nanosphere lithography provides an e-beam free method for patterning gold nanoplasmonic antennas. By combining this technique with deep-UV photolithography, we fabricate Si 3 N 4 waveguides interfaced to plasmonic antennas capable of exciting and collecting surface-enhanced Raman spectra. Surface-enhanced Raman spectroscopy (SERS) has become an established technique for a sensitive and selective detection in a myriad of applications [1]. Following the development of waveguide-based Raman spectroscopy [2][3][4], recent efforts successfully combined gold nano-antennas with dielectric photonic waveguides at visible wavelengths [5,6]. This led to first demonstrations of waveguide-based excitation and collection of surface-enhanced Raman scattering [6]. However, current approaches rely on very challenging fabrication schemes using (multiple) ebeam exposures with both critical alignment and resolution. Not only are these processes resource-intensive, they are also hard to combine with already patterned photonic circuits. As a consequence, the full potential of a mature integrated technology remains out of reach for SERS-based products. Important examples of these are the silicon or silicon nitride photonics platforms enabled by wafer-scale deep-UV patterning in a CMOS-fab [7]. In contrast, it is exactly this access to optimized and mass reproducible photonic components such as filters, modulators and spectrometers that drives continuing success of other types of integrated optical biosensors.Here, we introduce a nanosphere-lithography based method for patterning gold nanotriangles on deep-UV patterned Si 3 N 4 photonic waveguides. We demonstrate excitation and collection of surface-enhanced Raman spectra using this waveguide. To the best of our knowledge, this is the first demonstration of a waveguide-based, e-beam free SERS-platform. It opens a route towards a complete on-chip Raman spectrometer combining both the sensing area, the spectrometer and even the pump source.We start from a 4 cm 2 deep-UV patterned dye containing 220 nm thick and 1.6 μm wide Si 3 N 4 strip waveguides on a 2.4 μm SiO 2 layer on Si. On top of this chip a 5 μm wide opening is patterned in photoresist (AZ MiR 701) using UV contact lithography. After thinning down the resist to 400 nm using O 2 plasma (Vision 320 RIE, 50 sccm O 2, 75 W, 100 mTorr, 235 s), polystyrene beads with a 448 nm diameter are spin coated at an optimized speed, dilution and acceleration in order to acquire a hexagonally packed monolayer of beads in the opening on top of the waveguide (fig 1(a)). Next, a short O 2 plasma (15 s) is used to, on the one hand, ensure a good metal adhesion and, on the other hand, reduce the size of the beads such that final nanotriangles will have an optimal localized surface plasmon resonance for Raman excitation at 785 nm. These beads subsequently act as a mask for evaporating a 2 nm Ti adhesion layer and a 70 nm Au layer. After gold deposition, the beads and photoresist are lifted off, revealing the periodic array of gold nanotriang...

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Experimental measurement of plasmonic nanostructures embedded in silicon waveguide gaps

Cited by 34 publications

References 36 publications

Hybrid dielectric waveguide spectroscopy of individual plasmonic nanoparticles

Hybrid dielectric waveguide spectroscopy of individual plasmonic nanoparticles

On-chip surface-enhanced Raman spectroscopy using nanosphere-lithography patterned antennas on silicon nitride waveguides

Nanotriangle Decorated Silicon Nitride Waveguides for Integrated Surface-Enhanced Raman Spectroscopy

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