Experimental investigation on mode coupling of bulk mode silicon MEMS resonators

Yang, Yushi; Ng, Eldwin J.; Polunin, Pavel M.; Chen, Yunhan; Strachan, Scott; Hong, Vu A.; Ahn, Chang-Nam; Shoshani, Oriel; Shaw, Steven W.; Dykman, M. I.; Kenny, Thomas W.

doi:10.1109/memsys.2015.7051132

Cited by 14 publications

(11 citation statements)

References 11 publications

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“…This was motivated to achieve better understanding of complex fundamental dynamical phenomena or for developing new applications. The coupling of those modes can be either mechanically [26,[112][113][114][115] or electrically [28,30,116]. Also, they can be coupled linearly or nonlinearly among the structure itself [35,[117][118][119][120], for instance through internal resonances [32,121,122].…”

Section: Linear and Nonlinear Modal Couplingmentioning

confidence: 99%

Linear and nonlinear dynamics of micro and nano-resonators: Review of recent advances

Hajjaj

Jaber

Ilyas

et al. 2020

International Journal of Non-Linear Mechanics

117

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Micro and nanoelectromechanical systems M/NEMS have been extensively investigated and exploited in the past few decades for various applications and for probing fundamental physical phenomena. Understanding the linear and nonlinear dynamical behaviors of the movable structures in these systems is crucial for their successful implementation in various novel technologies and to meet the long list of new sophisticated requirements. This paper presents a review for some of the recent topics pertaining to the dynamical behaviors, linear and nonlinear, of M/NEMS resonating structures. First, an overview is presented of the various used dynamical approaches to enhance the sensitivity of resonators for sensing applications. Then a summary is presented of the recent works on the linear and nonlinear mode coupling in M/NEMS resonator. Next, recent research is reviewed on coupled M/NEMS resonators, mechanically and electrically, leading to collective behaviors like mode localization. The final part of the paper discusses analytical approaches that have been developed to better understand and investigate the dynamical behavior of M/NEMS resonators focusing on the perturbation method the multiple time scales.

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Section: Linear and Nonlinear Modal Couplingmentioning

confidence: 99%

Linear and nonlinear dynamics of micro and nano-resonators: Review of recent advances

Hajjaj

Jaber

Ilyas

et al. 2020

International Journal of Non-Linear Mechanics

117

View full text Add to dashboard Cite

show abstract

“…To further demonstrate the capabilities of the ZCA as well as the HVD whose application to the experimental data has rarely been reported in literature [8], both methods have been used to investigate the experimentally acquired ring-down response of a micro-electro-mechanical resonator [14,21,24,27]. Despite the need for additional smoothing and end-effects removing in the HVD, both methods were eventually able to estimate reasonable results.…”

Section: Discussionmentioning

confidence: 99%

“…To demonstrate the capabilities of the ZCA, it is used for the identification of elastic and dissipative nonlinearities in a double-anchored double-ended-tuning-fork micro-electro-mechanical (MEMS) resonator. The resonator was developed and tested, and the data were kindly provided by Stanford University [14,21,24,27]. The resonator, which was designed for time-keeping applications, consists of two micro-mechanical beams (200 µm long, 6 µm wide and 40 µm thick) that are connected on both ends to perforated masses, which are attached to the base.…”

Section: Application To Experimental Data From a Micro-electro-mechanmentioning

confidence: 99%

“…The system was driven into the non-linear resonant regime and, once the system reached its steady-state response at a specific amplitude and frequency, the external forcing was turned off and the transient ring-down response recorded. More information about the micro-electro-mechanical resonator and measurement set-up can be found in [14,21,24,27].…”

Section: Application To Experimental Data From a Micro-electro-mechanmentioning

confidence: 99%

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A method for non-parametric identification of non-linear vibration systems with asymmetric restoring forces from a resonant decay response

Ondra

Sever

Schwingshackl

2019

Mechanical Systems and Signal Processing

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A method for non-parametric identification of systems with asymmetric non-linear restoring forces is proposed in this paper. The method, named the zero-crossing method for systems with asymmetric restoring forces (ZCA), is an extension of zero-crossing methods and allows identification of backbones, damping curves and restoring elastic and dissipative forces from a resonant decay response. The validity of the proposed method is firstly demonstrated on three simulated resonant decay responses of the systems with off-centre clearance, bilinear and quadratic stiffness. Then, the method is applied to experimental data from a micro-electro-mechanical resonator in order to quantify its non-linear damping and stiffness effects. Throughout the paper the proposed method is also compared with the Hilbert vibration decomposition to demonstrate that the ZCA yields more accurate results with much less effort.

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“…Our presentation focuses on the interrelation between oscillation amplitude, frequency, and phase of the main mode. Experimentally, in fact, these are the most readily accessible quantities characterizing the stationary dynamics of the system [ 16 , 20 ]. The mathematical formulation developed in the Methods section yields the tools for obtaining the higher harmonic dynamics as well.…”

Section: Introductionmentioning

confidence: 99%

Internal Resonance in a Vibrating Beam: A Zoo of Nonlinear Resonance Peaks

Mangussi¹,

Zanette²

2016

PLoS ONE

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In oscillating mechanical systems, nonlinearity is responsible for the departure from proportionality between the forces that sustain their motion and the resulting vibration amplitude. Such effect may have both beneficial and harmful effects in a broad class of technological applications, ranging from microelectromechanical devices to edifice structures. The dependence of the oscillation frequency on the amplitude, in particular, jeopardizes the use of nonlinear oscillators in the design of time-keeping electronic components. Nonlinearity, however, can itself counteract this adverse response by triggering a resonant interaction between different oscillation modes, which transfers the excess of energy in the main oscillation to higher harmonics, and thus stabilizes its frequency. In this paper, we examine a model for internal resonance in a vibrating elastic beam clamped at its two ends. In this case, nonlinearity occurs in the form of a restoring force proportional to the cube of the oscillation amplitude, which induces resonance between modes whose frequencies are in a ratio close to 1:3. The model is based on a representation of the resonant modes as two Duffing oscillators, coupled through cubic interactions. Our focus is put on illustrating the diversity of behavior that internal resonance brings about in the dynamical response of the system, depending on the detailed form of the coupling forces. The mathematical treatment of the model is developed at several approximation levels. A qualitative comparison of our results with previous experiments and numerical calculations on elastic beams is outlined.

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Experimental investigation on mode coupling of bulk mode silicon MEMS resonators

Cited by 14 publications

References 11 publications

Linear and nonlinear dynamics of micro and nano-resonators: Review of recent advances

Linear and nonlinear dynamics of micro and nano-resonators: Review of recent advances

A method for non-parametric identification of non-linear vibration systems with asymmetric restoring forces from a resonant decay response

Internal Resonance in a Vibrating Beam: A Zoo of Nonlinear Resonance Peaks

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