Experimental investigation on micromilling of oxygen-free, high-conductivity copper using tungsten carbide, chemistry vapour deposition, and single-crystal diamond micro tools

Huo, Dehong; Cheng, Kai

doi:10.1243/09544054jem1828sc

Cited by 40 publications

(11 citation statements)

References 30 publications

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“…(13); the cutting and edge coefficients are obtained by fitting forces into Eq. (14). For this purpose, the least square method is adopted in which the coefficients are determined once the sum of squares of the error between predicted force and experimental results reaches the minimum:…”

Section: Parameters Calibrationmentioning

confidence: 99%

“…A number of cutting force models are proposed and studies for microcutting processes [1][2][3][4][5][6][7][8], which falls in four categories, i.e. analytical modelling [9][10][11][12], numerical modelling [7,8,13], empirical modelling [14][15][16][17] and hybrid modelling (combining the strengths of previous three modelling approaches). Davoudinejad et al [18] proposed a 3D FEM for studying the cutting forces in full slot end milling process.…”

Section: Introductionmentioning

confidence: 99%

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Investigation on Innovative Dynamic Cutting Force Modelling in Micro-milling and Its Experimental Validation

2018

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In this paper, an innovative cutting force modelling concept is presented by modelling cutting forces against micro-cutting processes such as micro-milling, ultraprecision turning and abrasive micromachining, and also taking account of microcutting dynamics. The modelling represents the underlying micro-cutting mechanics and physics in micro-milling in an innovative multi-scale manner, i.e. the specific cutting force at the unit length, unit area and unit volume by considering the size effect, cutting fracture energy, the material modulus, and the cutting heat and temperature partition. A novel instantaneous chip thickness algorithm is introduced to analyse the real chip thickness by taking account of the effects of the micro-tool geometry change brought up by the tool run-out and further contribute to the force model through a numerical iterative algorithm. The measured cutting forces are compensated by a Kalman filter to achieve the accurate cutting forces. This is further utilized to calibrate the model coefficients using least square method. The cutting force modelling is evaluated and validated through well-designed micro-milling trials, which can be used for optimizing the cutting process and tool cutting performance in particular.

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Section: Parameters Calibrationmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Investigation on Innovative Dynamic Cutting Force Modelling in Micro-milling and Its Experimental Validation

2018

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“…It is well-recognized that micro manufacturing has been a key enabling technology in industries producing useful micro components and products [1]. Micro milling is recognized as a versatile process and has found its application in processing various materials due to its wide material machining ability, high processing efficiency, low cost and low environmental requirements [2][3][4][5][6].…”

Section: Introductionmentioning

confidence: 99%

“…The new velocities are then used to determine the new displacements in Eq. (4). dt is the time interval set by the program.…”

Section: Introductionmentioning

confidence: 99%

An improved cutting force model for micro milling considering machining dynamics

Chen

Teng

Huo

et al. 2017

Int J Adv Manuf Technol

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Micro milling, as a versatile micro machining process, is kinematically similar to conventional milling; however, it is significantly different from conventional milling with respect to chip formation mechanisms and uncut chip thickness modelling, due to the comparable size of the edge radius to the chip thickness, and the small per-tooth feeding. Considering tool runout and dynamic displacement between the tool and the workpiece, the contour of the workpiece left by previous tool paths is typically in a wavy form, and the wavy surface provides a feedback mechanism to cutting force generation because the instantaneous uncut chip thickness changes with both the vibration during the current tool path and the surface left by the previous tool paths. In this study, a more accurate uncut chip thickness model was established including the precise trochoidal trajectory of the cutting edge, tool runout and dynamic modulation caused by the machine tool system vibration. The dynamic regenerative effect is taken into account by considering the influence of all the previous cutting trajectories using numerical iteration; thus, the multiple time delays (MTD) are considered in this model. It is found that transient separation of the tool-workpiece occurring at a low feed per tooth, caused by MTD and the existing cutting force models, is no longer applicable when transient tool-workpiece separation occurs. Based on the proposed uncut chip thickness model, an improved cutting force model of micro milling is developed by full consideration of the ploughing effect and elastic recovery of the workpiece material. The proposed cutting force model is verified by micro end milling experiments, and the results show that the proposed model is capable of producing more accurate cutting force prediction than other existing models, particularly at small feed per tooth.

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“…Micro-milling, an emerging micro-manufacturing process, has been successfully applied in fabrication of 3D complex shape micro-components with excellent dimensional accuracy and surface finish over various engineering materials, including metals such as aluminium [4][5][6], copper [7][8][9], titanium alloys [10,11], steels [12,13], graphite [14], tungsten carbides [15], polymers [16,17] and composites [18]. Recently, it has been applied in machining brittle materials and crystals [19][20][21][22][23] with success.…”

Section: Introductionmentioning

confidence: 99%

Surface and subsurface characterisation in micro-milling of monocrystalline silicon

Huo

Lin

Choong

et al. 2015

Int J Adv Manuf Technol

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This paper presents an experimental investigation on surface and subsurface characterisation of micro-machined single-crystal silicon with (100) orientation. Full immersion slot milling was conducted using solid cubic boron nitride (CBN) and diamond-coated fine grain tungsten carbide micro-end mills with a uniform tool diameter of 0.5 mm. The micro-machining experiments were carried out on an ultra-precision micro-machining centre. Formal design of experiments (DoE) techniques were applied to design and analysis of the machining process. Surface roughness, edge chipping formation and subsurface residual stress under varying machining conditions were characterised using white light interferometry, SEM and Raman microspectroscopy. Tens of nanometre-level surface roughness can be achieved under the certain machining conditions, and influences of variation of cutting parameters including cutting speeds, feedrate and axial depth of cut on surface roughness were analysed using analysis of variance (ANOVA) method. Raman microspectroscopy studies show that compressive subsurface residual stress and amorphous phase transformation were observed on most of the micro-machined subsurface, which provides evidence of ductile mode cutting. Surface and subsurface characterisation studies show that the primary material removal mode is ductile or partial ductile using lower feedrate for both tools, and diamond-coated tools can produce better surface quality. Silicon brain implants were fabricated with good dimensional accuracy and edge quality using the optimised machining conditions, which demonstrated that micro-milling is an effective process for fabrication of silicon components at a few tens to a few hundreds of micron scale.

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Experimental investigation on micromilling of oxygen-free, high-conductivity copper using tungsten carbide, chemistry vapour deposition, and single-crystal diamond micro tools

Cited by 40 publications

References 30 publications

Investigation on Innovative Dynamic Cutting Force Modelling in Micro-milling and Its Experimental Validation

Investigation on Innovative Dynamic Cutting Force Modelling in Micro-milling and Its Experimental Validation

An improved cutting force model for micro milling considering machining dynamics

Surface and subsurface characterisation in micro-milling of monocrystalline silicon

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