2012
DOI: 10.1088/0022-3727/45/47/475202
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Experimental investigation of the electron energy distribution function (EEDF) by Thomson scattering and optical emission spectroscopy

Abstract: DOI to the publisher's website. • The final author version and the galley proof are versions of the publication after peer review. • The final published version features the final layout of the paper including the volume, issue and page numbers. Link to publication General rights Copyright and moral rights for the publications made accessible in the public portal are retained by the authors and/or other copyright owners and it is a condition of accessing publications that users recognise and abide by the legal… Show more

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Cited by 29 publications
(36 citation statements)
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“…The results we present here also shed light on the interpretation of electron temperature measurements of contracted surface-wave discharges carried out by means of Thomson Scattering [21][22][23]. The experimental data show that the electron temperature increases significantly towards the border as the electron density decreases whenever the discharge is in the contracted regime.…”
Section: Introductionsupporting
confidence: 63%
See 1 more Smart Citation
“…The results we present here also shed light on the interpretation of electron temperature measurements of contracted surface-wave discharges carried out by means of Thomson Scattering [21][22][23]. The experimental data show that the electron temperature increases significantly towards the border as the electron density decreases whenever the discharge is in the contracted regime.…”
Section: Introductionsupporting
confidence: 63%
“…gives the most important contribution for the light scattering -may be approximated by a straight line, even in the worst cases. The contribution of more energetic electrons (u e > 2 eV) in the tail of the Doppler broadened scattering profile -which could possibly show the deviation from the equilibrium EEDF -is obscured by the signal noise [22]. That is why we may define the Thomson temperature as the temperature of the Maxwellian which best fits the non-equilibrium EEDF in the energy interval from 0 eV to 2 eV (see Fig.…”
Section: A Plasma Contractionmentioning
confidence: 99%
“…However, as the density distribution of electrons decreases exponentially with energy, only the lower part of the energy range exhibits a sufficient strong signal to noise ratio, see Figure . In the conditions of the present study, we observe the bulk of the EEDF and the determined T e represents the mean electron energy . Analyzing the TS results in our experiments we could not find deviations from a Maxwellian EEDF in the relatively low energy range that was detectable.…”
Section: Methodssupporting
confidence: 38%
“…Since the rate coefficient k ion ( T e ) strongly depends on the electron temperature it is clear that at higher argon pressures the electron temperature will be smaller. The reason is that pressure enhancement leads to reduced diffusion‐losses, so that the T e needed to sustain the plasma can be lower . The effect of volume recombination on the charged particle balance is equally important to diffusion at about 10 mbar .…”
Section: Discussionmentioning
confidence: 99%
“…When the electron energy distribution function (EEDF) has a Maxwellian distribution, the scattered spectrum will be Gaussian in shape which has been confirmed in figure 6(a). A Maxwellian distribution will lead to [26] dl…”
Section: Lts Measurement Resultsmentioning
confidence: 99%