Experimental investigation into Ball end Magnetorheological Finishing of silicon

Saraswathamma, K.; Jha, Sunil; Rao, P. Venkateswara

doi:10.1016/j.precisioneng.2015.05.003

Cited by 62 publications

(21 citation statements)

References 25 publications

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“…In addition, the types of abrasive particles used in the MR polishing fluid have a significant impact on the polishing performance for different materials. Cerium oxide abrasive particles may be added into the MR polishing fluid to polish a silicon sample or other related silicate glasses [15], whereas SiC or diamond abrasive particles are typically used to polish metal materials [16][17][18] In recent years, several methods of polishing the internal surfaces of cylindrical workpieces using MR polishing have been reported. For example, a magnetorheological abrasive flow finishing (MRAFF) process was developed to polish workpieces with complex internal geometries [19,20].…”

Section: Introductionmentioning

confidence: 99%

Annular Surface Micromachining of Titanium Tubes Using a Magnetorheological Polishing Technique

Song

Peng

et al. 2020

Micromachines

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In this study, a novel magnetorheological (MR) polishing device under a compound magnetic field is designed to achieve microlevel polishing of the titanium tubes. The polishing process is realized by combining the rotation motion of the tube and the reciprocating linear motion of the polishing head. Two types of excitation equipment for generating an appropriate compound magnetic field are outlined. A series of experiments are conducted to systematically investigate the effect of compound magnetic field strength, rotation speed, and type and concentration of abrasive particles on the polishing performance delivered by the designed device. The experiments were carried out through controlling variables. Before and after the experiment, the surface roughness in the polished area of the workpiece is measured, and the influence of the independent variable on the polishing effect is judged by a changing rule of surface roughness so as to obtain a better parameter about compound magnetic field strength, concentration of abrasive particles, etc. It is shown from experimental results that diamond abrasive particles are appropriate for fine finishing the internal surface of the titanium-alloy tube. It is also identified that the polishing performance is excellent at high magnetic field strength, fast rotation speed, and high abrasive-particle concentration.

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Section: Introductionmentioning

confidence: 99%

Annular Surface Micromachining of Titanium Tubes Using a Magnetorheological Polishing Technique

Song

Peng

et al. 2020

Micromachines

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“…Predicted response %ΔRa was calculated and found as 54.69 by regression model at an optimum machining conditions of magnetizing current = 5.7 A, tool rotational speed = 500 rpm and working gap = 0.66 mm. Saraswathamma et al [32] experimentally studied through statistical design of experiments the effect of process parameters such as core rotational speed, working gap, and magnetizing current on a percentage reduction in surface roughness of silicon wafer in BEMRF process. Individual effect on surface roughness values in terms of arithmetical mean roughness (Ra) was studied by applying ANOVA.…”

Section: A Past Investigationsmentioning

confidence: 99%

Magnetorheological Fluid Finishing of Soft Materials: A Critical Review

Sharma

Niranjan

2019

IJAPIE

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Magnetorheological Finishing (MRF) is one of the precision finishing processes and recently commercialized method for finishing of various materials like optical glasses, metals, non-metals etc. This method utilizes a suspension consisting of a fluid carrier which can be water or oil, both magnetic and non-magnetic particles and stabilizing agents. Rheological behavior of this mixture of magnetorheological (MR) fluid with abrasives changes under the influence of magnetic field which in turn regulates the finishing forces during finishing processes. Present study critically reviews the MRF process used for achieving nano-level finishing of soft materials and the advancements made in this process

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“…Based on experimental results, cutting force is the dependent variable, while feed, rotational speed, axial depth, radial depth, edge radius, and coating type are independent variables. According to the experiment based on orthogonal design, a predictive model of cutting force can be established in each of the three directions as follows [14].…”

Section: Setup Of Predictive Model For Cutting Forcementioning

confidence: 99%

Influence of edge preparation of coated carbide tool on milling aluminum alloy 211Z

Zhao

Lin

et al. 2019

J Braz. Soc. Mech. Sci. Eng.

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Edge preparation can improve tool life, cutting process stability, and quality of the machined surface. The coated tool must be edge-prepared after grinding to ensure enough bonding area to improve tool life. The influence of edge preparation on milling of aluminum alloy 211Z using the coated carbide tool is investigated via DEFORM simulations and corresponding cutting experiments. In this paper, the influence of edge radius, type of coating (TiN, TiCN, TiAlN, TiSiN, TiCrN), cutting speed, feed, axial depth, and radial depth on cutting force, surface roughness, and temperature is revealed. The results provide a basis for determining the effects of edge preparation. Moreover, theoretical values are used to reveal basic laws governing the cutting process, which may have practical significance.

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Experimental investigation into Ball end Magnetorheological Finishing of silicon

Cited by 62 publications

References 25 publications

Annular Surface Micromachining of Titanium Tubes Using a Magnetorheological Polishing Technique

Annular Surface Micromachining of Titanium Tubes Using a Magnetorheological Polishing Technique

Magnetorheological Fluid Finishing of Soft Materials: A Critical Review

Influence of edge preparation of coated carbide tool on milling aluminum alloy 211Z

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