Experimental evaluation of X‐ray optics applied for microanalysis

Węgrzynek, D.; Mroczka, Robert; Markowicz, A.; Chinea-Cano, E.; Bamford, S.

doi:10.1002/xrs.1113

Cited by 23 publications

(17 citation statements)

References 17 publications

(8 reference statements)

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“…It clearly depicts the shape of the excitation beam as a cylinder (corresponding to the measured U‐Lα counts) with very small variation in diameter. The size of the excitation beam in x – y plane corresponds to that obtained with the procedure based on scanning a thin wire: 37 × 25 μm, as reported previously in Wegrzynek et al The layer parallel to plane x – y in Figure a corresponds to the signal arising from the gold coating of the Mylar film detected with the confocal detector. Figure b depicts the location of the confocal effectively probed volume.…”

Section: Resultsmentioning

confidence: 64%

“…The spectrometer has been upgraded by the addition of a silicon drift detector (SDD) and a polycapillary conical lens for confocal XRF measurements. The main features of the instrument and the results of testing different focusing optics devices are described in Wegrzynek et al The spectrometer (see Figure ) after such modifications consists now of the following: an Mo‐anode X‐ray tube (3 kW and 60 kV) and a monolithic glass polycapillary lens (X‐Ray Optical Systems, Inc.) for focusing the primary excitation beam. The position of the lens can be manually adjusted by tuning a holder (xy translation and x ϕ y ϕ tilt) that is attached to the X‐ray tube exit window. two SDDs (10 mm 2 , 450‐μm thickness, 8‐μm Be window, energy resolution of 135 eV at 5.9 keV, and shaping constant of 1 μs).…”

Section: Methodsmentioning

confidence: 99%

“…[21] The spectrometer has been upgraded by the addition of a silicon drift detector (SDD) and a polycapillary conical lens for confocal XRF measurements. The main features of the instrument and the results of testing different focusing optics devices are described in Wegrzynek et al [22] The spectrometer (see Figure 1) after such modifications consists now of the following:…”

Section: Micro-xrf and Confocal Xrf Spectrometermentioning

confidence: 99%

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Experimental assessment of effectively probed volume in confocal XRF spectrometry using microparticles

et al. 2019

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Current approaches for assessing a confocal micro‐X‐rayfluorescence–probing volume involve the use of sharp knife edges, thin films, or wires, which are moved through this volume. The fluorescence radiation excited in the material of the object is measured, and profiles are built to enable the determination of the full width at half maximum in any of the three axes of the excited volume. Such approaches do not provide information on the shape of the volume, and the consequent alignment of both used lenses is made based on the position of the maxima of the registered intensity measurements. The use of particles that are smaller than the interaction volume (isolated enough to prevent the influence of nearby particles) and translated through the interaction volume (3D scan) is presented as an alternative methodology to determine the confocal probing volume. Spherical shaped uranium particles with diameter of 1–3 μm originally produced for scanning electron microscopy analysis calibration purposes were used in this study. The results obtained showed that the effectively probed confocal volume has a distinct prolate spheroidal shape that is longer in the axis of the confocal detector than it is wide on the axes of the plane perpendicular to it. The diameter in the longest axis (tilted accordingly to the angle between the two silicon drift detectors) was found to be approximately 25 μm, whereas the shorter was found about 15 μm each, with a volume of about 3,000 μm3.

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Section: Resultsmentioning

confidence: 64%

Section: Methodsmentioning

confidence: 99%

Section: Micro-xrf and Confocal Xrf Spectrometermentioning

confidence: 99%

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Experimental assessment of effectively probed volume in confocal XRF spectrometry using microparticles

et al. 2019

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“…The confocal volume was created by the intersection of the foci of a monolithic polycapillary at the excitation channel and a polycapillary conical collimator (PCCC) at the detection channel. [32] The The SPECTOR-LOCATOR software [33] was used for XRF data acquisition. The X-ray spectra were processed with the AXIL software package.…”

Section: Methodsmentioning

confidence: 99%

Monte Carlo simulation code for confocal 3D micro‐beam X‐ray fluorescence analysis of stratified materials

et al. 2011

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Stratified materials are of great importance for many branches of modern industry, e.g. electronics or optics and for biomedical applications. Examination of chemical composition of individual layers and determination of their thickness helps to get information on their properties and function. A confocal 3D micro X-ray fluorescence (3D µXRF) spectroscopy is an analytical method giving the possibility to investigate 3D distribution of chemical elements in a sample with spatial resolution in the micrometer regime in a non-destructive way. Thin foils of Ti, Cu and Au, a bulk sample of Cu and a three-layered sandwich sample, made of two thin Fe/Ni alloy foils, separated by polypropylene, were used as test samples. A Monte Carlo (MC) simulation code for the determination of elemental concentrations and thickness of individual layers in stratified materials with the use of confocal 3D µXRF spectroscopy was developed. The X-ray intensity profiles versus the depth below surface, obtained from 3D µXRF experiments, MC simulation and an analytical approach were compared. Correlation coefficients between experimental versus simulated, and experimental versus analytical model X-ray profiles were calculated. The correlation coefficients were comparable for both methods and exceeded 99%. The experimental X-ray intensity profiles were deconvoluted with iterative MC simulation and by using analytical expression. The MC method produced slightly more accurate elemental concentrations and thickness of successive layers as compared to the results of the analytical approach. This MC code is a robust tool for simulation of scanning confocal 3D µXRF experiments on stratified materials and for quantitative interpretation of experimental results.

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“…A polycapillary X-ray lens is one of the optics used for obtaining a micro X-ray beam in the laboratory. [1] Micro XRF instrument has been developed with a combination of a polycapillary X-ray lens and a fine-focus X-ray tube. This instrument has been applied to biological and cultural samples.…”

Section: Introductionmentioning

confidence: 99%

Depth‐selective elemental imaging of microSD card by confocal micro XRF analysis

Nakazawa

Tsuji

2013

X-Ray Spectrometry

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A semiconductor device, a microSD card, was measured by using two XRF instruments. 2D elemental images were obtained using a micro-XRF system with a spatial resolution of 10 mm. Elemental distributions of the near-surface region of the sample were clearly shown. Titanium was observed in the resin constituting the sample. Nickel and gold were observed on a terminal and localization of the sample. Elemental distribution of copper reflected the circuit structure of the measurement area that was in the neighborhood of the sample surface. Moreover, the elemental depth distributions of the sample were measured by using a confocal micro-XRF instrument. The confocal micro-XRF instrument was constructed in the laboratory with fine-focus polycapillary x-ray optics. The depth resolution of the developed spectrometer was 13.7 mm at an energy of Au Lb (11.4 keV). The elemental images obtained at near-surface by confocal micro-XRF were the same as the results obtained from 2D micro-XRF. However, different Cu images were obtained at a depth of several tens of micrometers. This indicates that microSD cards consist of a few different Cu-circuit structure designs. The elemental depth distributions of each circuit structure of the semiconductor device were clearly shown by confocal micro-XRF.

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Experimental evaluation of X‐ray optics applied for microanalysis

Cited by 23 publications

References 17 publications

Experimental assessment of effectively probed volume in confocal XRF spectrometry using microparticles

Experimental assessment of effectively probed volume in confocal XRF spectrometry using microparticles

Monte Carlo simulation code for confocal 3D micro‐beam X‐ray fluorescence analysis of stratified materials

Depth‐selective elemental imaging of microSD card by confocal micro XRF analysis

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