Experimental Evaluation of Vibration Influence on a Resonant MEMS Scanning System for Automotive Lidars

Yoo, Han Woong; Riegler, Rene; Brunner, David O.; Albert, Stephan; Thurner, Thomas; Schitter, Georg

doi:10.1109/tie.2021.3065608

Cited by 21 publications

(9 citation statements)

References 34 publications

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“…Low and ultra-low frequency vibration can have serious adverse effects on the performance of precision machining, micro-electro-mechanical systems (MEMS), as well as health care devices (Wang et al, 2019(Wang et al, , 2020aYang et al, 2021;Yoo et al, 2022). Vibration control can generally be divided into passive, active, and semi-active control strategies (Zhang et al, 2017).…”

Section: Introductionmentioning

confidence: 99%

A semi-active quasi-zero stiffness vibration isolator based on magnetorheological elastomer with a fast convergence switch control

Lin

Wen

2023

Journal of Intelligent Material Systems and Structures

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Quasi-zero stiffness (QZS) isolators have attracted extensive attention due to their high-static–low-dynamic stiffness. The effectiveness of the traditional QZS (T-QZS) isolators to attenuate low-frequency vibration has been extensively studied. The T-QZS isolator, however, cannot usually provide satisfactory vibration mitigation performance under ultra-low frequency excitation. To tackle this challenge, we propose a semi-active QZS isolator featuring magnetorheological elastomer (SAQZS-MRE isolator). The prominent merit of the proposed design is that the applied MRE material can provide varying stiffness and damping to the proposed SAQZS-MRE isolator, making the isolator suitable for vibration isolation under wide-band low-frequency range. The dynamic viscoelasticity properties of the MRE are experimentally characterized, to formulate the dynamic modeling of the SAQZS-MRE isolator. The open-loop vibration isolation characteristics of the SAQZS-MRE isolator are assessed using the harmonic balance method (HBM). Subsequently, two semi-active control strategies including skyhook and fast convergence switch (FCS) are effectively utilized in the proposed SAQZS-MRE isolator to evaluate their closed-loop performance. The results demonstrate that the SAQZS-MRE isolator with FCS control can eliminate the resonance peak and reduce the initial isolation frequency. In the higher frequency range, it can also improve the vibration isolation performance compared with the SAQZS-MRE isolator with passive control.

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Section: Introductionmentioning

confidence: 99%

A semi-active quasi-zero stiffness vibration isolator based on magnetorheological elastomer with a fast convergence switch control

Lin

Wen

2023

Journal of Intelligent Material Systems and Structures

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“…Zhiqiang and Yunhe [16][17][18] proposed that the stator rotor friction induced by electromechanical coupling oscillation of the shaft system of a hydraulic turbine would aggravate the bending-torsion coupling vibration of the rotor system and that a coupling relationship could be established between the transverse and longitudinal dynamic characteristics of the shaft system through the thrust bearing. 18 Yoo et al 19 demonstrate a vibration test for a resonant MEMS scanning system in operation to evaluate the vibration immunity for automotive lidar applications. An analysis of energy variation is proposed, showing direction dependency of vibration coupling.…”

Section: Introductionmentioning

confidence: 99%

Vibrational coupling mechanism and experimental study of rotor system with double-disk magnetic coupler

Wang

Guo

et al. 2023

Advances in Mechanical Engineering

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At present, the vibrational coupling mechanism of the rotor system with a double-disk magnetic coupler has not been sufficiently studied. Based on the mechanical impedance theory, the patterns of structural mass and stiffness distribution were quantitatively described, to establish the model for the vibrational coupling mechanism. Methods were proposed to determine the vibrational coupling point and to simulate the transient response to the interacting excitations, so as to analyze the potential vibrational coupling point and the dynamic response characteristics. Then, the Campbell diagram of the shared support-dual rotor system was combined with the mechanical impedance characteristics of the shared support. As a result, it was found that although the base vibration of the shared support was significantly amplified, the single-axis trajectory showed that both the output and input rotors were synchronized with the forward vortex motion, with almost no coupling between them. A double-disk magnetic coupler test bench with a rated power of 55 kW was designed to verify the experiments. The results showed that the vibration displacement occurred in a periodic variation pattern. Moreover, the maximum errors between the theoretical, simulated, and experimental values of the vibration displacement at different input speeds were less than 5%. The experiments verified the validity of the model for the vibrational coupling mechanism and the simulation of the transient response to the interacting excitation. The results of the study could be used as a basis for calculating the vibration of the rotor system with a double-disk magnetic coupler.

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“…In recent years, due to huge demands in the fields of Light Detection and Ranging (LiDAR) [1][2][3][4][5][6] , wearable near-to-eye display 7,8 , and vehicle Head Up Display (HUD) 9 , among others, microelectromechanical systems (MEMS) scanning mirror technology attracts extensive attention. Many scanners based on various MEMS actuators have been developed, among which the electrostatic comb drive actuated devices have the advantages of low power consumption, IC process compatibility, and compactness 10,11 .…”

Section: Introductionmentioning

confidence: 99%

Portable confocal-controlled LIBS microscopy based on MEMS mirror scanning

Wang,

Peng,

Cui

et al. 2023

Optoelectronic Imaging and Multimedia Technology X

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Miniaturized two-dimensional scanning mirror based on microelectromechanical systems (MEMS) technology has great potential in automotive industry, consumer electronics, and biomedicine, etc. Due to its high frequency and large angle, resonant scanning is the mainstream in all MEMS actuation mechanisms, such as harmonic resonant electromagnetic scanner and parametric resonant electrostatic scanner.Although electrostatic scanner has the advantages of low power consumption and IC process compatibility, some shortcomings of parametric resonance, including double frequency of driver electronics and additional feedback control or frequency stabilization system, limit its further application. The symmetry of coplanar electrostatic comb actuator is broken in this paper, and harmonic resonant electrostatic scanner with excellent performance is realized. Further, through adopting mechanical filter, two-dimensional scanning can be achieved through one set of actuators, which avoids the problem that two sets (each for one dimension) of electrostatic actuators must be insulated each other through complicated and expensive processes. A two-2 dimensional MEMS scanner based on symmetry breaking and mechanical filter was proposed and demonstrated. Multiple scanning modes can be achieved through selective control of a set of four identical actuators.

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Experimental Evaluation of Vibration Influence on a Resonant MEMS Scanning System for Automotive Lidars

Cited by 21 publications

References 34 publications

A semi-active quasi-zero stiffness vibration isolator based on magnetorheological elastomer with a fast convergence switch control

A semi-active quasi-zero stiffness vibration isolator based on magnetorheological elastomer with a fast convergence switch control

Vibrational coupling mechanism and experimental study of rotor system with double-disk magnetic coupler

Portable confocal-controlled LIBS microscopy based on MEMS mirror scanning

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