Advanced Photonics for Communications 2014
DOI: 10.1364/iprsn.2014.jt3a.26
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Experimental Evaluation of a Stamped Micro Mirror

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“…We also developed proprietary stamping techniques that can produce mirror finishes in metallic optical benches. 19 The mirrors can be as small as a few hundred micrometers in size with sub-micron accuracy and surface finishes as low as R a 4 nm without secondary processing. Figure 3(a) shows exemplary metrology data demonstrating that sub-micrometer form error in individual micro freeform mirrors and an 8 x 1 array of mirrors stamped in a set of MOBs (as seen in photo in 1(a)).…”
Section: Stamped Mirrors For High-power Applicationsmentioning
confidence: 99%
“…We also developed proprietary stamping techniques that can produce mirror finishes in metallic optical benches. 19 The mirrors can be as small as a few hundred micrometers in size with sub-micron accuracy and surface finishes as low as R a 4 nm without secondary processing. Figure 3(a) shows exemplary metrology data demonstrating that sub-micrometer form error in individual micro freeform mirrors and an 8 x 1 array of mirrors stamped in a set of MOBs (as seen in photo in 1(a)).…”
Section: Stamped Mirrors For High-power Applicationsmentioning
confidence: 99%
“…We also developed proprietary stamping techniques that can produce mirror finishes in metallic optical benches. 13 The mirrors can be as small as a few hundred micrometers in size with sub-micron accuracy and surface finishes as low as R a 4 nm without secondary processing. Figure 5(a) shows exemplary metrology data demonstrating that sub-micrometer form error in individual micro freeform mirrors and an 8 x 1 array of mirrors stamped in a set of MOBs (as seen in photo in Fig.…”
Section: Stamped Mirror Array For Rgb Laser Modulementioning
confidence: 99%