Experimental determination of the oxygen K-shell fluorescence yield using thin SiO 2 and Al 2 O 3 foils

Hönicke, Philipp; Kolbe, Michael; Krumrey, Michael; Unterumsberger, Rainer; Beckhoff, Burkhard

doi:10.1016/j.sab.2016.08.024

Cited by 31 publications

(28 citation statements)

References 19 publications

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“…Each spectrum is then deconvoluted using the detector response functions for the fluorescence lines of interest and relevant background contributions . Using tabulated and experimentally determined, fundamental parameter data, the mass deposition of the respective material can be quantified from the deconvoluted fluorescence intensities …”

Section: Resultsmentioning

confidence: 99%

Development and Synchrotron‐Based Characterization of Al and Cr Nanostructures as Potential Calibration Samples for 3D Analytical Techniques

Dialameh

Lupi

Hönicke

et al. 2017

Physica Status Solidi (a)

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The continuous and aggressive scaling in semiconductor technology results in the integration of increasingly complex 3D architectures and new materials. The realization of these downscaled 3D structures requires also further improvement in 3D characterization techniques. In this work, a potential route to improve the accuracy and reliability of the quantitative analysis of 3D nano-devices is investigated. 3D organic and inorganic reference nanostructures with dimensions and structural ordering resembling those utilized in industrial applications are fabricated and characterized in detail. The 3D organic nanostructures are fabricated exploiting the selfassembly capability of di-block copolymers. Subsequent deposition of a thin Al film lead to the formation and realization of nanostructured Al. In addition, different inorganic nanostructures are fabricated using electron beam lithography. The various nanostructures are characterized with respect to their dimensions as well as composition using various analytical techniques namely reference-free grazing incidence X-ray fluorescence, grazing incidence small angle X-ray scattering, scanning electron microscopy, and spectroscopic ellipsometry. status solidi physica a Di-Block Copolymers www.pss-a.com

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Section: Resultsmentioning

confidence: 99%

Development and Synchrotron‐Based Characterization of Al and Cr Nanostructures as Potential Calibration Samples for 3D Analytical Techniques

Dialameh

Lupi

Hönicke

et al. 2017

Physica Status Solidi (a)

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“…A free-standing 500 nm Ni foil was used for these experiments at the FCM beamline of PTB [42]. The applied experimental procedures follow our earlier works on the experimental determination of the O-K [53] and the Ti-K shell [49] fluorescence yields as well as the previously described determination of the L-shell fluorescence yields. From the measured transmission of the foil, experimental values for the self-attenuation of the foil as well as the PECS can be derived.…”

Section: B Nickel K -Shell Fluorescence Yieldmentioning

confidence: 99%

Theoretical and experimental determination of K - and L -shell x-ray relaxation parameters in Ni

et al. 2018

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Fluorescence yields (FY) for the Ni K and L shells were determined by a theoretical and an experimental group within the framework of the International Initiative on X-ray Fundamental Parameters (FPs) collaboration. CosterKronig (CK) parameters were also measured for the L shell of Ni. Theoretical calculations of the same parameters were performed using the Dirac-Fock method, including relativistic and QED corrections. The experimental values for the FY and CK were determined at the PTB laboratory in the synchrotron radiation facility BESSY II, Berlin, Germany, and are compared to the corresponding calculated values.

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“…The Physikalisch-Technische Bundesanstalt (PTB), Germany's national metrology institute, determines atomic fundamental parameters by means of the reference-free XRF approach [2][3][4][5] . In X-ray spectrometry the term fundamental parameters (FP) generally refers to element specific parameters relevant to the production of XRF radiation such as fluorescence yields, line widths and energies, relative transition probabilities and, in the case of L-shells and higher shells, Coster-Kronig transition probabilities.…”

Section: Introductionmentioning

confidence: 99%

Experimental determination of line energies, line widths and relative transition probabilities of the Gadolinium L x-ray emission spectrum

et al. 2019

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In this work the complete L-emission spectrum of gadolinium with respect to line energies, natural line widths, and relative transition probabilities was investigated using monochromatized synchrotron radiation. The measurements were realized in the PTB laboratory at BESSY II by means of an in-house built von Hamos spectrometer based on up to two full-cylinder HAPG mosaic crystal. The von Hamos spectrometer is calibrated by means of elastically scattered photons from the employed synchrotron radiation beamline leading to a well-defined energy scale and an experimentally determined spectrometer response. A selective excitation of the gadolinium L subshells was carried out to ensure a robust deconvolution of neighboring emission lines of different L subshells. The experimental results are discussed in the context of existing data from common databases and published values since significant deviations, especially for the Lγ 2 and Lγ 3 emission lines, are observed. We further substantiate and discuss two satellite lines at the low-energy side of the Lβ 2,15 and Lγ 1 emission lines arising from the N 4,5 subshell. 12/1515/15

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Experimental determination of the oxygen K-shell fluorescence yield using thin SiO 2 and Al 2 O 3 foils

Cited by 31 publications

References 19 publications

Development and Synchrotron‐Based Characterization of Al and Cr Nanostructures as Potential Calibration Samples for 3D Analytical Techniques

Development and Synchrotron‐Based Characterization of Al and Cr Nanostructures as Potential Calibration Samples for 3D Analytical Techniques

Theoretical and experimental determination of K - and L -shell x-ray relaxation parameters in Ni

Experimental determination of line energies, line widths and relative transition probabilities of the Gadolinium L x-ray emission spectrum

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