A large number of investigations involving neutral metastable atoms have been carried out with the purpose of discussing both macroscopic and microscopic characteristics of low-temperature plasma sources in argon for over three decades. The accumulated set of these data comprising the number density and temperature of the metastable, N* and Tg, as well as the electron density ne in various kinds of low-temperature plasmas over a wide range of external parameters enable the analysis and review of the inner plasma parameter in the form of relative densities, and normalized by the feed gas density Ng, under a theoretical basis for the correlation derived from a rate equation in real space. The development of non-invasive diagnostics for metastables by tunable diode laser in the visible, near-infrared domain (<1 m) has been indispensable. This has enabled optical absorption spectroscopy for measurements of N* and Tg of metastables in argon.
A reasonable correlation was found between and during the steady-state phase in capacitively and inductively coupled plasmas, and micro hollow cathode discharge. However, there exists a large deviation from theory in atmospheric pressure and helicon discharges. A high degree of positive correlation between and demonstrates that the metastable density N* can be an indirect indicator of the plasma density in a low-temperature plasma. Doppler-shifted laser-induced fluorescence to determine the two-dimensional velocity distribution of neutral metastables close to the plasma–wall interface is discussed as a probe of plasma–wall interaction.