2015
DOI: 10.1038/srep14714
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Exfoliation of large-area transition metal chalcogenide single layers

Abstract: Isolating large-areas of atomically thin transition metal chalcogenide crystals is an important but challenging task. The mechanical exfoliation technique can provide single layers of the highest structural quality, enabling to study their pristine properties and ultimate device performance. However, a major drawback of the technique is the low yield and small (typically < 10 μm) lateral size of the produced single layers. Here, we report a novel mechanical exfoliation technique, based on chemically enhanced a… Show more

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Cited by 256 publications
(201 citation statements)
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References 21 publications
(30 reference statements)
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“…The chalcogenide is deposited on a gold substrate; top layers are removed by thermal adhesive tape leaving behind a large monolayer. 48 The limitations on throughput can be overcome by exfoliation in the liquid phases. 15, 45, 46, 49 In general, direct sonication of a layered host is carried out in a solvent chosen to stabilize the exfoliated sheets and sometimes selected based on matching surface tension to solid surface energies.…”
Section: Fabrication Methods Processing and Exposure Potentialmentioning
confidence: 99%
“…The chalcogenide is deposited on a gold substrate; top layers are removed by thermal adhesive tape leaving behind a large monolayer. 48 The limitations on throughput can be overcome by exfoliation in the liquid phases. 15, 45, 46, 49 In general, direct sonication of a layered host is carried out in a solvent chosen to stabilize the exfoliated sheets and sometimes selected based on matching surface tension to solid surface energies.…”
Section: Fabrication Methods Processing and Exposure Potentialmentioning
confidence: 99%
“…We have prepared mechanically exfoliated MoS 2 single layers on atomically flat Au (111) substrates using a slightly modified version of a recently developed exfoliation technique 27 yielding single layers with lateral dimension of hundreds of microns (see Supplementary section I. for details). Such large area samples are characterized by an extremely low edge to surface ratio, grain boundary concentration, as well as a much smaller concentration and variety of intrinsic point defects 28 , establishing them as an excellent model system for studying the intrinsic chemical properties of the pristine basal plane.…”
Section: Ambient Oxidation Of the Basal Plane Revealed At Single-atommentioning
confidence: 99%
“…Despite rapid progress in recent years, the performance of devices fabricated from 2D materials generated with these deposition methods have lagged behind the performance of those fabricated from geologically sourced 2D materials. 34,[37][38][39][40][41] In the interim, metal-mediated exfoliation techniques that yield millimeter scale 2D materials [42][43][44] can permit the realization of large arrays of devices and complex logic circuits. However, 2D material flakes obtained through metal-mediated exfoliation can suffer from both organic and metal contamination originating from multiple adhesive transfer steps, which can degrade device performance through uncontrolled channel doping and charge traps at the 2D material-gate oxide interfaces, making the fabrication of devices with these 2D material flakes difficult.…”
Section: Introductionmentioning
confidence: 99%