Excitation of hypersonic acoustic waves in diamond-based piezoelectric layered structure on the microwave frequencies up to 20 GHz

Sorokin, B. P.; Квашнин, Г. М.; Novoselov, A. S.; Бормашов, В. С.; Голованов, А. В.; Burkov, S. I.; Бланк, В. Д.

doi:10.1016/j.ultras.2017.01.014

Cited by 21 publications

(9 citation statements)

References 8 publications

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“…In the last case, if taking a given point close to room temperature, the quality parameter QÁf with the frequency variation must change as a linearly proportional function in a manner of QÁf~f, i.e., the quality factor must not depend on the frequency in that approximation. That result has earlier been proven for operational frequencies up to 20 GHz at room temperature [7]. Also, this fact is of great practical importance, as it allows realizing acoustoelectronic devices on diamond substrates at hypersonic frequencies with an acceptable level of acoustic attenuation.…”

Section: Resultsmentioning

confidence: 61%

“…Earlier, we have obtained by means of HBAR based on PLS involved the single-crystalline diamond substrate and AlN thin-film piezoelectric transducer that such assumption has been quite fulfilled for operational frequencies up to 20 GHz at room temperature (Ref. [7]). Also, this fact is of great practical importance, as it allows realizing acoustoelectronic devices on diamond substrates at hypersonic frequencies with an acceptable level of acoustic attenuation.…”

Section: Investigation Of Temperature Dependences Of Acoustic Parametmentioning

confidence: 90%

“…But the highest frequencies of the acoustic overtone excitation did not exceed 10 GHz. Recently, a distinctive progress in the achievement of record resonance frequencies up to 20 GHz has been emphasized by the development of HBAR based on piezoelectric layered structure (PLS) involving the single-crystalline diamond substrate and AlN thin-film piezoelectric transducer (TFPT) [7].…”

Section: Introductionmentioning

confidence: 99%

See 2 more Smart Citations

Application of Thin Piezoelectric Films in Diamond-Based Acoustoelectronic Devices

Sorokin¹,

Квашнин²,

Novoselov³

et al. 2018

Piezoelectricity - Organic and Inorganic Materials and Applications

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The theory of external loading influence on acoustic parameters of piezoelectric fivelayered structure as "Al/(001) AlN/Mo/(001) diamond/Me" has been developed. Oscillations in diamond-based high-overtone bulk acoustic resonators (HBARs) have been investigated in terms of 3D FEM simulation. Peculiarities of technology of aluminum-scandium nitride (ASN) films have been discussed. Composition Al 0.8 Sc 0.2 N was obtained to create the diamond-based HBAR and SAW resonator. Application of ASN films has resulted in a drastic increasing an electromechanical coupling up to 2.5 times in comparison with aluminum nitride. Development of ASN technology in a way of producing a number of compositions with the better piezoelectric properties has a clear prospective. SAW resonator based on "Al IDT/(001) AlN/(001) diamond" structure has been investigated in the band 400-1500 MHz. The highest-quality factor Q ≈ 1050 was observed for the Sezawa mode at 1412 MHz. Method of measuring HBAR's parameters within 4-400 K at 0.5-5 GHz has been developed. Results on temperature dependence of diamond's Qfactor at relatively low frequencies were quite different in comparison with the ones at the frequencies up to 5 GHz. Difference could be explained in terms of changing mechanism of acoustic attenuation from Akhiezer's type to the Landau-Rumer's one at higher frequencies in diamond.

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Section: Resultsmentioning

confidence: 61%

Section: Investigation Of Temperature Dependences Of Acoustic Parametmentioning

confidence: 90%

Section: Introductionmentioning

confidence: 99%

See 1 more Smart Citation

Application of Thin Piezoelectric Films in Diamond-Based Acoustoelectronic Devices

Sorokin¹,

Квашнин²,

Novoselov³

et al. 2018

Piezoelectricity - Organic and Inorganic Materials and Applications

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show abstract

“…The amplitude was enhanced by 68.6%, whereas −6 dB bandwidth was enhanced from 30.2% to 58.3%. Such acoustic impedance-matching techniques can be further developed to suit modern composite acoustic devices such as High-tone Bulk Acoustic Resonators (HBAR) and Solid Mounted Resonator (SMR) operating at microwave operational frequencies (20 GHz) [318][319][320][321]. These devices of thin film piezoelectric materials have interesting frequency response characteristics concerned with the acoustical performance and are of great importance as sensors.…”

Section: Very High-frequency Ultrasonic Transducersmentioning

confidence: 99%

A Review of Acoustic Impedance Matching Techniques for Piezoelectric Sensors and Transducers

Rathod

2020

Sensors

161

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The coupling of waves between the piezoelectric generators, detectors, and propagating media is challenging due to mismatch in the acoustic properties. The mismatch leads to the reverberation of waves within the transducer, heating, low signal-to-noise ratio, and signal distortion. Acoustic impedance matching increases the coupling largely. This article presents standard methods to match the acoustic impedance of the piezoelectric sensors, actuators, and transducers with the surrounding wave propagation media. Acoustic matching methods utilizing active and passive materials have been discussed. Special materials such as nanocomposites, metamaterials, and metasurfaces as emerging materials have been presented. Emphasis is placed throughout the article to differentiate the difference between electric and acoustic impedance matching and the relation between the two. Comparison of various techniques is made with the discussion on capabilities, advantages, and disadvantages. Acoustic impedance matching for specific and uncommon applications has also been covered.

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“…Hence, owing to HBAR's high quality factor in the microwave band, one can get increasing sensitivity taking into account the high operational frequency which will sufficiently exceed that in SAW-or FBAR-based sensors. However, such an opportunity can only be realized if the substrate's material possesses low acoustic attenuation in the microwave frequency band, e.g., diamond [16]. Here, diamond's excellent acoustic properties were investigated in the microwave band up to 20 GHz.…”

Section: Introductionmentioning

confidence: 99%

Peculiarities of the Acoustic Wave Propagation in Diamond-Based Multilayer Piezoelectric Structures as “Me1/(Al,Sc)N/Me2/(100) Diamond/Me3” and “Me1/AlN/Me2/(100) Diamond/Me3” under Metal Thin-Film Deposition

et al. 2022

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New theoretical and experimental results of microwave acoustic wave propagation in diamond-based multilayer piezoelectric structures (MPS) as “Me1/(Al,Sc)N/Me2/(100) diamond/Me3” and “Me1/AlN/Me2/(100) diamond/Me3” under three metal film depositions, including the change in the quality factor Q as a result of Me3 impact, were obtained. Further development of our earlier studies was motivated by the necessity of creating a sensor model based on the above fifth layered MPS and its in-depth study using the finite element method (FEM). Experimental results on the change in operational checkpoint frequencies and quality factors under the effect of film deposition are in satisfactory accordance with FEM data. The relatively small decrease in the quality factor of diamond-based high overtone bulk acoustic resonator (HBAR) under the metal layer effect observed in a wide microwave band could be qualified as an important result. Changes in operational resonant frequencies vs. film thickness were found to have sufficient distinctions. This fact can be quite explained in terms of the difference between acoustic impedances of diamond and deposited metal films.

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Excitation of hypersonic acoustic waves in diamond-based piezoelectric layered structure on the microwave frequencies up to 20 GHz

Cited by 21 publications

References 8 publications

Application of Thin Piezoelectric Films in Diamond-Based Acoustoelectronic Devices

Application of Thin Piezoelectric Films in Diamond-Based Acoustoelectronic Devices

A Review of Acoustic Impedance Matching Techniques for Piezoelectric Sensors and Transducers

Peculiarities of the Acoustic Wave Propagation in Diamond-Based Multilayer Piezoelectric Structures as “Me1/(Al,Sc)N/Me2/(100) Diamond/Me3” and “Me1/AlN/Me2/(100) Diamond/Me3” under Metal Thin-Film Deposition

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