2007
DOI: 10.1016/j.tsf.2007.03.118
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Excimer laser processing of inkjet-printed and sputter-deposited transparent conducting SnO2:Sb for flexible electronics

Abstract: The feasibility of low temperature fabrication of transparent electrode elements from thin films of Antimony doped Tin Oxide (SnO2:Sb, ATO) has been investigated via inkjet printing, rf magnetron sputtering and post deposition excimer laser processing. Laser processing of thin films on both glass and plastic substrates was performed using a Lambda Physik 305i excimer laser, with fluences in the range 20mJcm -2 -100mJcm

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Cited by 26 publications
(8 citation statements)
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“…Polycrystalline and epitaxial growth of various MO films ( Table 2 ) has been demonstrated using laser irradiation of amorphous layers derived from CSD methods . UV lasers have been the preferred choice in these studies due to the higher optical absorbance of MOs in the UV range.…”
Section: Recent Progress and Advances In Laser Processing Of Metal Oxmentioning
confidence: 99%
“…Polycrystalline and epitaxial growth of various MO films ( Table 2 ) has been demonstrated using laser irradiation of amorphous layers derived from CSD methods . UV lasers have been the preferred choice in these studies due to the higher optical absorbance of MOs in the UV range.…”
Section: Recent Progress and Advances In Laser Processing Of Metal Oxmentioning
confidence: 99%
“…Inks with nano-ITO-particles can be used to fabricate laterally structured front electrodes by printing techniques, and thus may reduce the consumption drastically (e.g., Evonik’s VP AdNano ® ITO is advertised for such purposes). Further alternatives based on Al-doped ZnO (AZO) [ 72 ], Sb-doped SnO 2 (ATO) [ 73 ] or organics are under development for the transparent electrode, but will still need some time to replace ITO. A real alternative are conductive polymers like PEDOT:PSS (commercially available from various suppliers); they are easy to apply, may be neutral in colour and meanwhile show conductivities high enough to support AC-EL at least on moderately sized panels.…”
Section: Materials For Ac-electroluminescencementioning
confidence: 99%
“…An extensive body of work on LA of conductive metal oxides, mainly used as transparent electrodes, has been reported . Amongst them, the influence of laser treatment on commercially available fluorine‐doped tin oxide (FTO) has been thoroughly investigated by Li et al After reporting on the optoelectronic response of laser treated Pt/FTO and Ni/FTO thin films, their work focused on the effect of ultrasonic vibration during laser irradiation.…”
Section: Laser Annealingmentioning
confidence: 99%