Excimer laser micromachining with half-tone masks for the fabrication of 3-D microstructures

Holmes, Andrew S.

doi:10.1049/ip-smt:20040374

Cited by 23 publications

(18 citation statements)

References 13 publications

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“…A method has previously been described that enables rapid measurement of the material ablation curve using a half-tone mask [17]. This method uses a mask with regions of known transmission to create a stepped-multi-level structure in the workpiece after exposure with a homogenized laser beam.…”

Section: Normal Incidence Measurementsmentioning

confidence: 99%

A study of angular dependence in the ablation rate of polymers by nanosecond pulses

Pedder

Holmes

2006

Photon Processing in Microelectronics and Photonics V

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Measurements of ablation rate have traditionally been carried out only at normal incidence. However, in real-world applications ablation is often carried out at oblique angles, and it is useful to have prior knowledge of the ablation rate in this case. Detailed information about the angular dependence is also important for the development of ablation simulation tools, and can provide additional insight into the ablation mechanism. Previously we have reported on the angular dependence of direct-write ablation at 266 nm wavelength in solgel and polymer materials. In this paper we present a systematic study of angular dependence for excimer laser ablation of two polymer materials of interest for microfabrication: polycarbonate and SU8 photoresist. The results are used to improve simulation models to aid in mask design.

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Section: Normal Incidence Measurementsmentioning

confidence: 99%

A study of angular dependence in the ablation rate of polymers by nanosecond pulses

Pedder

Holmes

2006

Photon Processing in Microelectronics and Photonics V

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“…The advanced ultrafast laser has opened up a new avenue for microfabrication due to the ultrashort pulse width and extremely high pulse intensity, which enable spatially localized modification either on the surface or in the bulk of materials. The response of polymer materials to the laser pulse is complex because of optical absorption, photochemical reaction, thermal and mechanical effects, which are import but most of which are usually unknown completely [21,22].…”

Section: Introductionmentioning

confidence: 99%

Characterization of Polymer Fiber Bragg Grating With Ultrafast Laser Micromachining

Liu

Cardoso²,

Zhang

et al. 2016

IEEE Photon. Technol. Lett.

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Abstract-We report that the main photosensitive mechanism of poly(methyl methacrylate)-based optical fiber Bragg grating (POFBG) under ultraviolet laser micromachining is a complex process of both photodegradation and negative thermo-optic effect. We found experimentally the unique characteristics of Bragg resonances splitting and reunion during laser micromachining process providing evidence of photodegradation while the mean refractive index change of POFBG was measured to be negative confirming further photodegradation of polymer fiber. The thermal-induced refractive index change of POFBG was also observed by recording the Bragg wavelength shift. Furthermore the dynamic thermal response of the micromachined-POFBG was demonstrated under constant humidity, showing a linear and negative response of around -47.1 pm/°C.

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“…The mechanism of FBG inscribed in polymer fibre is the photoinduced refractive index change effect in the polymer materials. However, it is still not fully clear that the UV radiation induced photosensitivity effects in PMMA material [13][14][15][16]. Wavelength (nm)…”

Section: Introductionmentioning

confidence: 99%

Effects in ultrafast laser micromachining PMMA-based optical fibre grating

Liu

Chen

Cardoso³

et al. 2016

SPIE Proceedings

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Ultrafast laser owns extreme small beam size and high pulse intensity which enable spatial localised modification either on the surface or in the bulk of materials. Therefore, ultrafast laser has been widely used to micromachine optical fibres to alter optical structures. In order to do the precise control of the micromachining process to achieve the desired structure and modification, investigations on laser parameters control should be carried out to make better understanding of the effects in the laser micromachining process. These responses are important to laser machining, most of which are usually unknown during the process. In this work, we report the real time monitored results of the reflection of PMMA based optical fibre Bragg gratings (POFBGs) during excimer ultraviolet laser micromachining process. Photochemical and thermal effects have been observed during the process. The UV radiation was absorbed by the PMMA material, which consequently induced the modifications in both spatial structure and material properties of the POFBG. The POFBG showed a significant wavelength blue shift during laser micromachining. Part of it attributed to UV absorption converted thermal energy whilst the other did not disappear after POFBG cooling off, which attributed to UV induced photodegradation in POF.

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Excimer laser micromachining with half-tone masks for the fabrication of 3-D microstructures

Cited by 23 publications

References 13 publications

A study of angular dependence in the ablation rate of polymers by nanosecond pulses

A study of angular dependence in the ablation rate of polymers by nanosecond pulses

Characterization of Polymer Fiber Bragg Grating With Ultrafast Laser Micromachining

Effects in ultrafast laser micromachining PMMA-based optical fibre grating

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